Journal of Northeastern University(Natural Science)
Experimental Study on Influencing Factor of Surface Quality in Micro Side Grinding of Single Crystal Silicon
ZHOU Yun-guang， GONG Ya-dong， GAO Qi， ZHU Zong-xiao
Journal of Northeastern University Natural Science . 2017, (7): 983 -988 .  DOI: 10.12068/j.issn.1005-3026.2017.07.015