东北大学学报（自然科学版）

东北大学学报:自然科学版 ›› 2014, Vol. 35 ›› Issue (2): 232-235.DOI: 10.12068/j.issn.1005-3026.2014.02.018

• 材料与冶金 • 上一篇    下一篇

具有纳米多孔结构的WO3薄膜的制备

梅宇栋，蔡佳佳，李松，秦高梧   

  1. (东北大学 材料各向异性与织构教育部重点实验室， 辽宁 沈阳110819)
  • 收稿日期:2013-05-22 修回日期:2013-05-22 出版日期:2014-02-15 发布日期:2013-11-22
  • 通讯作者: 梅宇栋
  • 作者简介:梅宇栋(1990-)，男，浙江台州人，东北大学博士研究生；秦高梧(1970-)，男，江苏盐城人，东北大学教授，博士生导师.
  • 基金资助:
    国家自然科学基金资助项目(51002026)；中央高校基本科研业务费专项资金资助项目(N110410002，N110810001).

Preparation of WO3 Films with Nanoporous Structure

MEI Yudong， CAI Jiajia， LI Song， QIN Gaowu   

  1. Key Laborotary for Anisotropy and Texture of Materials
  • Received:2013-05-22 Revised:2013-05-22 Online:2014-02-15 Published:2013-11-22
  • Contact: QIN Gaowu
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摘要： 研究了阶跃加压阳极氧化法在金属钨基底上制备具有多层纳米孔结构形貌的WO3薄膜的工艺，主要研究了阳极氧化条件对生成纳米孔结构的影响及热处理制度对样品形貌和结构的影响.结果表明:在60V电压和20℃反应温度条件下，在含质量分数为005%NH4F的电解液中阳极氧化20min得到的样品表面，具有形貌规则的自组装纳米多层网孔结构，且排列紧密.此外，将阳极氧化制得的样品以5℃/min的速率升温至450℃并保温3h，可使生成的无定形氧化钨薄膜在保持多孔结构形貌基本不变的条件下晶化.

关键词: WO3, 阳极氧化, NH4F, 纳米多孔结构, 热处理

Abstract: Thin films of WO3 nanoporous structure grown on tungsten substrates using the anode oxidation method were studied. The effects of anodic oxidation conditions such as the concentration of NH4F in the electrolyte， the applied voltage and the heat treatment schedule on the surface morphologies of the WO3 film were investigated. The preparation conditions to form nanoporous WO3 film with good microstructure were optimized. It was found that the films prepared in electrolyte containing 005 wt.% NH4F for 20min with the applied voltage of 60V at 20℃ exhibited the expected nanoporous morphology with self assembled nano multilayer mesh structure closely packed. In addition，after heat treated at 450℃ for 3h with a heating rate of 5℃/min， the amorphous films crystallized without changing their asobtained nanoporous structures.

Key words: WO3, anode oxidation, NH4F, nanoporous structure, heat treatment

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