硅片抛光的接触压强分布与宏观形貌创成机理
关学锋;吕玉山;冯连东;
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Guan, Xue-Feng (1); Lü, Yu-Shan (2); Feng, Lian-Dong (2)
东北大学学报(自然科学版) . 2011, (8): 1173 -1177 .  DOI: -