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马树军，修强

Modelling and Simulation of a Surface Stress-Included Microcantilever-based Mass Sensor

MA Shu-jun， XIU Qiang

东北大学学报:自然科学版 . 2018, (2): 237 -241 . DOI: 10.12068/j.issn.1005-3026.2018.02.018