东北大学学报（自然科学版）
中频非平衡磁控溅射制备Ti-N-C膜
张以忱;巴德纯;颜云辉;马胜歌;
Ti-N-C films deposited by MF unbalanced magnetron sputtering process with twin targets
Zhang, Yi-Chen (1); Ba, De-Chun (1); Yan, Yun-Hui (1); Ma, Sheng-Ge (2)
东北大学学报(自然科学版) . 2008, (7): 1049 -1052 .  DOI: -