射频负偏压等离子体鞘层流体动力学模拟

吕少波;蔺增;巴德纯;李麟涉;

Simulation of rf-biased plasma sheath using hydrodynamic method

Lu, Shao-Bo (1); Lin, Zeng (1); Ba, De-Chun (1); Lee, In-Seop (2)

东北大学学报(自然科学版) . 2008, (6): 881 -884 . DOI: -