ZAO透明导电纳米薄膜中Al元素分布对其性能的影响

陆峰;徐成海;孙超;闻立时

Al element distribution and the properties of transparent conducting ZAO nanometer film

Lu, Feng (1); Xu, Cheng-Hai (1); Sun, Chao (2); Wen, Li-Shi (2)

东北大学学报(自然科学版) . 2003, (1): 54 -57 . DOI: -