射频PECVD方法生长含氢非晶碳膜的结构及摩擦学性能

李明;蔺增;王凤;巴德纯;

Structure and tribological properties of a-C:H films deposited by RF PECVD

Li, Ming (1); Lin, Zeng (1); Wang, Feng (1); Ba, De-Chun (1)

东北大学学报(自然科学版) . 2007, (12): 1745 -1748 . DOI: -