中频反应磁控溅射Al_2O_3薄膜的光学性质
廖国进;闻立时;巴德纯;刘斯明;
Optical properties of Al2O3 thin film prepared through medium-frequency reactive magnetron sputtering process
Liao, Guo-Jin (1); Wen, Li-Shi (2); Ba, De-Chun (1); Liu, Si-Ming (3)
东北大学学报(自然科学版)
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2007, (5): 687
-691
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DOI: -
