N注入过程中Ti薄膜内的晶体结构变化
王建军;粕壁善隆;刘春明;
Changes of crystal structure in Ti thin films during N implantation
Wang, Jian-Jun (1); Kasukabe, Yoshitaka (2); Liu, Chun-Ming (1)
东北大学学报(自然科学版) . 2012, (12): 1722 -1725 .  DOI: -