东北大学学报（自然科学版）

东北大学学报(自然科学版) ›› 2013, Vol. 34 ›› Issue (9): 1305-1309.DOI: -

• 机械工程 • 上一篇    下一篇

带重入约束的双集束型晶圆制造设备调度算法

周炳海，石潇铭   

  1. (同济大学机械与能源工程学院，上海201804)
  • 收稿日期:2013-01-20 修回日期:2013-01-20 出版日期:2013-09-15 发布日期:2013-04-22
  • 通讯作者: 周炳海
  • 作者简介:周炳海(1965-)，男，浙江浦江人，同济大学教授，博士生导师.
  • 基金资助:
    国家自然科学基金资助项目(61273035，71071115).

Scheduling Algorithm for DoubleCluster Tools of Wafer Fabrication System with Reentrant Constraints

ZHOU Binghai， SHI Xiaoming   

  1. School of Mechanical Engineering， Tongji University， Shanghai 201804， China.
  • Received:2013-01-20 Revised:2013-01-20 Online:2013-09-15 Published:2013-04-22
  • Contact: ZHOU Binghai
  • About author:-
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摘要： 为了有效解决集束型晶圆制造设备群加工过程中存在的重入调度问题，构建了带重入约束的双集束型晶圆制造设备调度算法.首先分析了双集束型晶圆制造设备中重入约束特征.在此基础上，建立调度问题域，并以系统加工周期最小为目标，建立调度模型.采用分解策略，将双集束型晶圆制造设备调度问题分解成单个设备调度问题，并提出了一种全新的机械手调度顺序搜索的启发式算法.最后对调度算法进行仿真实验分析，结果表明该算法是有效的.

关键词: 集束型设备群, 调度, 重入约束, 算法, 仿真实验

Abstract: To effectively solve scheduling problems of multicluster tools of wafer fabrication system with reentrant constraints in running process， a scheduling algorithm was proposed. Firstly， the characteristics of reentrant constraints of doublecluster tools were analyzed. The problem domain of doublecluster tool scheduling was established and mathematical programming models were set up to minimize the system cycle time. The scheduling problems of the doublecluster tools were decomposed into scheduling problems of singlecluster tool using the decomposition policy. A novel enlighten algorithm of robotic sequence searching was presented. Finally， simulation experiments were carried out to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid.

Key words: multicluster tools, scheduling, reentrant constraints, algorithm, simulation experiments

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