东北大学学报（自然科学版）

东北大学学报:自然科学版 ›› 2018, Vol. 39 ›› Issue (1): 11-14.DOI: 10.12068/j.issn.1005-3026.2018.01.003

• 信息与控制 • 上一篇    下一篇

基于光子晶体微腔和光纤环形衰荡的微力传感器

钱晓龙， 张亚男   

  1. (东北大学 信息科学与工程学院， 辽宁 沈阳110819)
  • 收稿日期:2016-06-24 修回日期:2016-06-24 出版日期:2018-01-15 发布日期:2018-01-31
  • 通讯作者: 钱晓龙
  • 作者简介:钱晓龙(1966-)，男，辽宁鞍山人，东北大学教授.
  • 基金资助:
    国家自然科学基金资助项目 (61425003，61273059); 中央高校基本科研业务费专项资金资助项目(N160404012)； 流程工业综合自动化国家重点实验室项目(2013ZCX09).

Micro-force Sensor Based on Photonic Crystal Micro-cavity and Fiber Loop Ring-Down

QIAN Xiao-long， ZHANG Ya-nan   

  1. School of Information Science & Engineering， Northeastern University， Shenyang 110819， China.
  • Received:2016-06-24 Revised:2016-06-24 Online:2018-01-15 Published:2018-01-31
  • Contact: ZHANG Ya-nan
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摘要： 提出一种基于光子晶体微腔的高灵敏度的微力测量方法.首先，提出一种M型结构的梁作为传感探头，使系统在受到微力作用时，仅有光子晶体微腔的空气孔折射率发生变化而引起谐振波长的漂移，极大地提高了传感器的线性度和测量范围.然后，对微纳环结构的光子晶体微腔结构进行优化设计，获得了品质因子高达7100的微腔.最后，选择合适的实验器件及其特性参数，搭建基于光纤环形衰荡的波长解调系统，实验结果表明该系统的波长解调灵敏度为90μs/nm，所设计的微力测量系统的灵敏度可达194.616μs/μN.

关键词: 光子晶体微腔, M型梁, 微力传感器, 光纤环形衰荡, 品质因子

Abstract: A high-sensitive micro-force measurement method based on photonic crystal micro-cavity was proposed. Firstly， an M-typed beam was proposed as the sensing head， thus the resonance wavelength drift of the micro-cavity will only be affected by holes refractive index of photonic crystal micro-cavity when force was applied on this system， which could greatly improve the linearity and measurement range of sensor. Then， the structure of photonic crystal micro-cavity with micro-ring structure was optimized， and the quality factor of 7100 was obtained. Finally， the wavelength demodulation system based on fiber loop ring-down was built， with proper selection and design of experimental apparatuses， and the wavelength demodulation sensitivity could reach to 90μs/nm. Therefore， it was demonstrated that the measurement sensitivity of 194.616μs/μN could be obtained by using our proposed micro-force measurement system.

Key words: photonic crystal micro-cavity, M-typed beam, micro-force sensor, fiber loop ring-down, quality factor

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