TiAlSiN涂层结构对涂层力学性能的影响

doi:10.12068/j.issn.1005-3026.2025.20230286

摘要/Abstract

摘要：

采用真空电弧离子镀技术，使用TiSi (原子比80∶20)和AlTi (原子比67∶33)合金作为靶材，在WC-Co基体上沉积双层及多层TiAlSiN涂层.研究了涂层结构对微观结构、力学特性、摩擦学性能的影响.采用TEM，SEM，EDS，XRD、纳米压痕仪、显微硬度仪、结合力测试仪分别对涂层的截面及磨痕形貌、磨痕成分、微观结构、弹性模量、显微硬度、结合力等进行了分析；采用摩擦磨损试验机对涂层的摩擦学性能进行了分析.结果表明：多层结构涂层的结合力（>200 N）优于双层结构涂层,双层结构涂层具有较强的抵抗塑性变形能力，而多层结构涂层抵抗弹性变形的能力较强.在小载荷下涂层的摩擦系数受涂层表面形貌影响较大，而在大载荷下涂层的表面形貌对摩擦系数影响较小.氧化磨损仅出现在双层结构涂层中，而磨粒磨损在2种涂层摩擦过程均有出现，多层结构涂层的耐磨性能优于双层结构涂层.

关键词: 电弧离子镀, TiAlSiN, 微观结构, 力学特性, 摩擦学性能

Abstract:

TiSi （atomic ratio 80∶20） and AlTi （atomic ratio 67∶33） alloys were used as target materials by the vacuum arc ion plating technique. Two layers and multiple layers of TiAlSiN coating were deposited on the WC-Co substrates to study the effects of the coating structure on the microstructure， mechanical properties， and tribological properties of the coatings. TEM，SEM， EDS， XRD， nano-indentation instrument， microhardness instrument and binding force tester were used to analyze the cross sections of the coatings and the morphologies， compositions， microstructures， elastic moduli， microhardness and binding force of the coating. The tribological properties of the coatings were analyzed by the friction and wear testing machine. The results showed that the binding force （greater than 200 N） of the multilayer coatings is higher than that of the double-layer coatings. The double-layer coatings exhibit stronger resistance to plastic deformation， while the multilayer coatings show stronger resistance to elastic deformation. The friction coefficient of the coatings under low loads is greatly affected by the surface topography of the coating， while the surface topography of the coating under large load has little effect on the friction coefficient. Oxidation wear occurs only in the double-layer coatings， while abrasive wear occurs in the friction wear process of both coatings. The wear resistance of the multi-layer coatings is higher than that of the double-layer coatings.

Key words: arc ion plating, TiAlSiN, microstructure, mechanical property, tribological property

中图分类号:

TB 43

刘兴龙, 李晨, 蔺增. TiAlSiN涂层结构对涂层力学性能的影响[J]. 东北大学学报（自然科学版）, 2025, 46(4): 33-42.

Xing-long LIU, Chen LI, Zeng LIN. Effect of TiAlSiN Coating Structure on Its Mechanical Properties[J]. Journal of Northeastern University(Natural Science), 2025, 46(4): 33-42.

图/表 16

图1 真空电弧离子镀膜机

Fig.1 Vacuum arc ion plating machine

表1 试样化学成分（质量分数） (（mass fraction） %)

Table 1 Chemical composition of the sample

WC	Co	C	其他
9.85	6.0	5.57	0.15

表2 涂层的沉积参数

Table 2 Deposition parameters of the coatings

步骤	偏置电压/V	Ar cm³·min^-1	H₂ cm³·min^-1	N₂稳压/ Pa	弧电流/ A			沉积温度/℃	沉积时间/min
步骤	偏置电压/V	Ar cm³·min^-1	H₂ cm³·min^-1	N₂稳压/ Pa	Ti	AlTi	TiSi	沉积温度/℃	沉积时间/min
a-1	50	100	0	—	80	0	0	480	15
a-2	140	100	100	—	80	0	0	480	15
a-3	140	100	0	—	100	0	0	480	30
a-4	150	100	0	—	100	0	0	480	30
a-5	40	0	0	3.5	0	140	0	480	60
a-6	80	0	0	3.5	0	140	0	480	20
a-7	80	0	0	3.5	0	0	140	480	70
b-1	50	100	0	—	80	0	0	480	15
b-2	140	100	100	—	80	0	0	480	15
b-3	140	100	0	—	100	0	0	480	30
b-4	150	100	0	—	100	0	0	480	30
b-5	60	0	0	3.5	0	140	0	480	60
b-6	60	0	0	3.5	0	140	0	480	2
b-7	60	0	0	3.5	0		140	480	2
b-(8~21)	b-6与b-7往复叠层
b-22	60	0	0	3.5	0	140	0	480	30

图2 涂层的球坑磨痕及结构示意图(a)—双层结构涂层; (b)—多层结构涂层.

Fig.2 Ball pit wear marks and structure diagram of the coating

图3 TiAlSiN涂层的XRD图谱

Fig.3 XRD pattern of the TiAlSiN coating

图4 双层及多层结构涂层高分辨截面TEM显微图像及EDS面扫描图像（a）—SiTiN层，TEM形貌；（b）—SiTiN层，TEM形貌（放大）；（c）—SiTiN层，EDS面扫描；（d）—AlTiN层，TEM形貌；（e）—AlTiN层，EDS面扫描；（f）—AlTiN/SiTiN层，TEM形貌；（g）—AlTiN/SiTiN层，EDS面扫描.

Fig.4 TEM micrograph and EDS scanning image ofhigh-resolution cross-section of the double and multilayer structural coatings

图5 涂层的表面形貌（a）—双层结构涂层；（b）—多层结构涂层.

Fig.5 Surface morphology of the coating

图6 大颗粒与凹坑的尺寸与数量分布

Fig.6 Size and number distribution of large particles and pits

图7 不同涂层的弹性模量、硬度、H/E与H3/E2

Fig.7 Modulus, hardness, H/E, and H3/E2 of different coatings

图8 2种涂层结合力对比

Fig.8 Comparison of bonding force between two coatings

图9 划痕试验中双层结构涂层的声发射信号AE、加载力Fn、穿透深度Pd、划痕形貌

Fig.9 AE signal (AE), loading force (Fn), penetration depth (Pd), and scratch morphology of the dual-layer coating measured in the scratch test

图10 划痕试验中多层结构涂层的声发射信号AE、加载力Fn、穿透深度Pd、划痕形貌

Fig.10 AE signal (AE), loading force (Fn), penetration depth (Pd), and scratch morphology of the multi-layer structured coating measured in the scratch test

图11 涂层在不同载荷下的摩擦系数（a）—1 N；（b）—1 N；（c）—1 N；（d）—1 N.

Fig.11 Friction coefficient of the coating under different loads

图12 涂层在不同载荷下的摩擦系数及磨损形貌（a）—双层结构；（b）—多层结构.

Fig.12 Friction coefficient and wear morphology ofthe coating under different loads

图13 涂层在不同载荷下磨损率

Fig.13 Coating wear rate under different loads

图14 涂层磨痕的SEM及EDS面扫描图像(a)—双层结构涂层；（b）—多层结构涂层.

Fig.14 SEM and EDS elemental mapping images ofcoating wear marks

参考文献 29

1	Makabe R， Nakajima S， Tabata O， et al. Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. power［J］. Thin Solid Films， 1986， 137（1）： 49-50.
2	Chang C L， Chen W C， Tsai P C， et al. Characteristics and performance of TiSiN/TiAlN multilayers coating synthesized by cathodic arc plasma evaporation［J］. Surface and Coatings Technology， 2007， 202（4/5/6/7）： 987-992.
3	Boelens S， Veltrop H. Hard coatings of TiN，（TiHf）N and （TiNb）N deposited by random and steered arc evaporation［J］. Surface and Coatings Technology， 1987， 33： 63-71.
4	Cho C W， Lee Y Z. Effects of the oxide layer formed on TiN coated silicon wafer on the friction and wear characteristics in dry sliding［J］. Surface & Coatings Technology，2003，168（1）：84-90.
5	Rebouta L， Vaz F， Andritschky M， et al. Oxidation resistance of （Ti， Al， Zr， Si）N coatings in air［J］. Surface and Coatings Technology， 1995， 76： 70-74.
6	Palmier S， Rullier J L， Capoulade J， et al. Effect of laser irradiation on silica substrate contaminated by aluminum particles［J］. Applied Optics， 2008， 47（8）： 1164-1170.
7	Artur R S， Evgenii D K， Yuriy A G， et al. Improvement of mechanical properties and adhesion of Ti-Al-Si-N coatings by alloying with Ta［J］. Lubricants，2020，10（178）：178.
8	Ramazanov K N， Vardanyan E L， Mukhamadeev V R， et al. Change in the chemical composition of a carbide tool with TI-Al-N coating surface layers during machining［J］. Journal of Surface Investigation： X-Ray， Synchrotron and Neutron Techniques， 2022， 16（3）： 412-415.
9	Kehal A， Saoula N， Abaidia S E H， et al. Effect of Ar/N₂ flow ratio on the microstructure and mechanical properties of Ti-Cr-N coatings deposited by DC magnetron sputtering on AISI D2 tool steels［J］. Surface and Coatings Technology， 2021， 421： 127444.
10	Kiryukhantsev-Korneev P V， Shtansky D V， Petrzhik M I， et al. Thermal stability and oxidation resistance of Ti-B-N， Ti-Cr-B-N， Ti-Si-B-N and Ti-Al-Si-B-N films［J］. Surface and Coatings Technology， 2007， 201（13）： 6143-6147.
11	Zhang C， Qiu J T， Kong F， et al. Plasma surface treatment of Cu by nanosecond-pulse diffuse discharges in atmospheric air［J］. Plasma Science and Technology， 2018， 20（1）： 014011.
12	Tanaka Y， Ichimiya N， Onishi Y， et al. Structure and properties of Al-Ti-Si-N coatings prepared by the cathodic arc ion plating method for high speed cutting applications［J］. Surface and Coatings Technology， 2001， 146： 215-221.
13	Hörling A， Hultman L， Odén M， et al. Mechanical properties and machining performance of Ti_1- _x Al _x N-coated cutting tools［J］. Surface and Coatings Technology， 2005， 191（2/3）： 384-392.
14	Yu D H， Wang C Y， Cheng X L， et al. Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology［J］. Thin Solid Films， 2009， 517（17）： 4950-4955.
15	Liu A H， Deng J X， Cui H B. Friction and wear properties of TiN， AlTiN， AlTiN and CrAlN PVD nitride coatings［J］. International Journal of Refractory Metals and Hard Materials，2012，31：82-88.
16	Fukumoto N， Ezura H， Suzuki T. Synthesis and oxidation resistance of TiAlSiN and multilayer TiAlSiN/CrAlN coating［J］. Surface and Coatings Technology， 2009， 204（6/7）： 902-906.
17	Li W Z， Yuan Z W， Zhu Y B， et al. Influence of nitrogen partial pressure on structure， mechanical and tribological properties of TaCN coatings［J］. Ceramics International， 2021， 47（18）： 26233-26241.
18	Xia B， Zhou S G， Wang Y X， et al. Multilayer architecture design to enhance load-bearing capacity and tribological behavior of CrAlN coatings in seawater［J］. Ceramics International， 2021， 47（19）： 27430-27440.
19	Geng D S， Zeng R K， Wu Z T， et al. An investigation on microstructure and milling performance of arc-evaporated TiSin/AlTiN film［J］. Thin Solid Films， 2020， 709： 138243.
20	Wan Q， Yang B， Chen Y M， et al. Effect of bilayer period on microstructure and mechanical properties of TiSiN/TiN coatings［J］. Materialia， 2018，3：260-264.
21	Yao Y R， Li J L， Wang Y X， et al. Influence of the negative bias in ion plating on the microstructural and tribological performances of Ti-Si-N coatings in seawater［J］. Surface and Coatings Technology， 2015， 280： 154-162.
22	Kowalski S， Cygnar M. The application of TiSiN/TiAlN coatings in the mitigation of fretting wear in push fit joints［J］. Wear， 2019， 426： 725-734.
23	费加喜. 电弧离子镀TiAlN基涂层的制备及其性能研究［D］. 广州：广东工业大学， 2018.
	Fei Jia-xi. Preparation and properties of TiAlN-based coating by arc ion plating［D］. Guangzhou： Guangdong University of Technology， 2018.
24	Shtansky D V， Kiryukhantsev-Korneev P V， Bashkova I A， et al. Multicomponent nanostructured films for various tribological applications［J］. International Journal of Refractory Metals and Hard Materials， 2010， 28（1）： 32-39.
25	查旭明. 双层与纳米多层结构TiSiN/TiAlN涂层的力学及切削性能研究［D］. 泉州：华侨大学， 2020.
	Zha Xu-ming. Study on mechanical and cutting properties of TiSiN/TiAlN coatings with double-layer and nano-multilayer structures［D］. Quanzhou： Huaqiao University， 2020.
26	程正. Ti₆Al₄V切削过程热力耦合作用下刀具磨损研究［D］. 昆明：昆明理工大学， 2019.
	Cheng Zheng. Study on tool wear under thermal-mechanical coupling in Ti₆Al₄V cutting process［D］. Kunming： Kunming University of Science and Technology， 2019.
27	Stewart V A， Brown R H. The interrelationship of shear and friction processes in machining under regenerative chatter conditions［M］//Proceedings of the Thirteenth International Machine Tool Design and Research Conference. London： Macmillan Education UK， 1973： 13-18.
28	Pu R， Yu Z G， Hao X Q， et al. Effect of Si content on microstructure， mechanical properties， and cutting performance of TiSiN/AlTiN dual-layer coating［J］. Journal of Manufacturing Processes，2020，88：134-144.
29	Zhang H D， Mei F S， Yu Y， et al. Improvement on the mechanical， tribological properties and cutting performance of AlTiN-based coatings by compositional and structural design［J］. Surface and Coatings Technology， 2021， 422： 127503.

[1]	罗忠, 赵江, 许春阳, 曹航. 考虑关节间隙的可调矢量喷管动力学特性[J]. 东北大学学报（自然科学版）, 2025, 46(1): 61-67.
[2]	杨尚武, 瞿海霞, 黎恒君, 刘常升. 激光熔覆(Ti,W)C增强镍基涂层的性能[J]. 东北大学学报（自然科学版）, 2024, 45(7): 953-959.
[3]	孙大增, 赵文, 许兴亮, 王鑫. 不同组构砂岩微观破坏特征分析[J]. 东北大学学报（自然科学版）, 2024, 45(4): 584-591.
[4]	刘俊汝，张国华，周国治. w(Fe)/w(Ni)对Mo₂FeB₂基金属陶瓷的影响[J]. 东北大学学报（自然科学版）, 2023, 44(9): 1269-1278.
[5]	常德强，陈蕾，毛宁，柳静献. PCT纤维耐酸特性试验研究[J]. 东北大学学报（自然科学版）, 2023, 44(6): 863-870.
[6]	王震，姜茂发，刘承军，闵义. CaO-SiO₂-Al₂O₃-Na₂O-MgO系模铸保护渣微观结构解析[J]. 东北大学学报（自然科学版）, 2023, 44(4): 517-523.
[7]	康玉梅，谷今，魏梦琦. 不同加载速率下软硬互层类岩石力学及声发射特性[J]. 东北大学学报（自然科学版）, 2023, 44(3): 399-407.
[8]	赵飞翔，迟世春. 基于离散元的碎片尺寸随机的颗粒破碎模拟方法[J]. 东北大学学报（自然科学版）, 2023, 44(3): 408-414.
[9]	贾蓬，祝鹏程，李博，毛松泽. 热损伤大理岩波动特征及声发射特性试验研究[J]. 东北大学学报（自然科学版）, 2023, 44(2): 279-288.
[10]	吴冠庆，魏进，岳夏冰，阴增亮. 低填方钢波纹管涵洞受力变形特性及垂直土压力计算[J]. 东北大学学报（自然科学版）, 2022, 43(9): 1337-1345.
[11]	许江波，费东阳，孙浩珲，崔易仑. 节理千枚岩能量传递与动力学特性[J]. 东北大学学报（自然科学版）, 2021, 42(7): 986-995.
[12]	何聪，徐国元，张志刚. 地震作用下沉管隧道节段接头剪力键的力学性能[J]. 东北大学学报（自然科学版）, 2021, 42(6): 871-878.
[13]	罗忠，孙永航，葛长闯，许春阳. 引射器活门调节机构的流固热耦合特性[J]. 东北大学学报（自然科学版）, 2021, 42(1): 75-82.
[14]	李明，刘铭瑞，周立明. 力电湿多物理场耦合Cell-Based光滑有限元法研究[J]. 东北大学学报:自然科学版, 2020, 41(9): 1363-1368.
[15]	马辉，崔璨，曾劲，闻邦椿. 考虑弹性支承的旋转凸肩叶片动力学特性分析[J]. 东北大学学报:自然科学版, 2019, 40(8): 1115-1121.