东北大学学报（自然科学版）

东北大学学报(自然科学版) ›› 2011, Vol. 32 ›› Issue (5): 712-715.DOI: -

• 论著 • 上一篇    下一篇

MOD法在不同种子层上制备La_(0.4)Sr_(0.6)TiO_3缓冲层的研究

罗清威;冉阿倩;洪成哲;樊占国;   

  1. 东北大学材料与冶金学院;金策工业综合大学物理工程研究所;
  • 收稿日期:2013-06-19 修回日期:2013-06-19 发布日期:2013-04-04
  • 通讯作者: -
  • 作者简介:-
  • 基金资助:
    国家高技术研究发展计划项目(2008AA03Z202);;

Preparing La0.4Sr0.6TiO3 buffer on different seed layers using metal-organic deposition

Luo, Qing-Wei (1); Ran, A-Qian (1); Hong, Song-Chol (1); Fan, Zhan-Guo (1)   

  1. (1) School of Materials and Metallurgy, Northeastern University, Shenyang 110819, China; (2) Institute of Physical Engineering, Kim Chaek University of Technology, Pyongyang, Korea, People's Democratic Rep
  • Received:2013-06-19 Revised:2013-06-19 Published:2013-04-04
  • Contact: Luo, Q.-W.
  • About author:-
  • Supported by:
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摘要： 采用金属有机沉积法(MOD)在双轴织构的Ni-5%W基带上制备了La0.4Sr0.6TiO3,LaTiO3和SrTiO3三种种子层,然后再在种子层上沉积La0.4Sr0.6TiO3薄膜.SEM图像显示种子层颗粒分布均匀,大小基本一致.通过XRD和SEM研究了不同种子层对La0.4Sr0.6TiO3薄膜取向和表面形貌的影响.结果显示,在LaTiO3种子层上Ar-4%H2气氛下950℃制备的薄膜取向良好,表面光滑致密,无裂纹和孔洞出现.

关键词: MOD法, 种子层, 热处理, La0.4Sr0.6TiO3缓冲层

Abstract: La0.4Sr0.6TiO3, LaTiO3, and SrTiO3 seed layers were prepared on biaxially textured Ni-5% W alloy substrates by metal-organic deposition (MOD) methodology, and then a La0.4Sr0.6TiO3 buffer layer was deposited on each seed layers. SEM imaging showed that the grains of seed layers had similar size and were distributed uniformly. The effect of different seed layers on the quality of LSTO films was investigated by XRD and SEM. Well-oriented, smooth, and dense La0.4Sr0.6TiO3 films were prepared on LaTiO3 seed layers under an Ar-4% H2 atmosphere with an annealing temperature of 950°C.

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