东北大学学报（自然科学版）

东北大学学报（自然科学版） ›› 2023, Vol. 44 ›› Issue (1): 82-88.DOI: 10.12068/j.issn.1005-3026.2023.01.012

• 机械工程 • 上一篇    下一篇

超声振动辅助抛光BK7过程中聚氨酯抛光垫磨损行为

梁赢东， 牛俊开， 张超， 于天彪   

  1. (东北大学 机械工程与自动化学院， 辽宁 沈阳110819)
  • 发布日期:2023-01-30
  • 通讯作者: 梁赢东
  • 作者简介:梁赢东(1993-)，男，辽宁辽阳人，东北大学博士研究生; 于天彪(1968-)，男，吉林榆树人，东北大学教授，博士生导师.
  • 基金资助:
    国家重点基础研究发展计划项目(2017YFA0701200)； 国家自然科学基金资助项目(U1508206).

Wear Behavior of Polyurethane Polishing Pads Used in BK7 Ultrasonic Vibration-Assisted Polishing

LIANG Ying-dong， NIU Jun-kai， ZHANG Chao， YU Tian-biao   

  1. School of Mechanical Engineering & Automation， Northeastern University， Shenyang 110819， China.
  • Published:2023-01-30
  • Contact: YU Tian-biao
  • About author:-
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摘要： 抛光光学玻璃等硬脆材料时常选用聚氨酯抛光垫，其微观形貌和磨损直接影响抛光精度和效率.本文对不同抛光时长下聚氨酯抛光垫微观形貌和磨损行为及其对材料去除率和表面粗糙度的影响进行了实验研究.结果表明:当主轴转速为8000r/min，进给速度为0.0150mm/s，轴向超声振幅为5μm时，材料去除率和表面粗糙度分别为0.977μm/min 和153.67nm.聚氨酯抛光垫在30min内磨损量较小，随着抛光时长的增加，抛光垫表面孔隙逐渐被磨粒和玻璃碎屑填充，破坏抛光垫表面的疏松多孔结构，导致抛光垫表面硬化，失去弹性.同时，侵入抛光垫表面的磨粒会阻止抛光接触区域内的磨粒更新，导致抛光质量降低.

关键词: 超声振动辅助抛光；微观形貌:抛光垫磨损；光学玻璃(BK7)；聚氨酯抛光垫

Abstract: Polyurethane polishing pads are often used for polishing hard and brittle materials such as optical glass. The morphology and the wear of polishing pads directly influence the polishing accuracy and efficiency. Experimental studies were conducted on the micro-morphology and wear behavior of polyurethane polishing pads during different polishing time and their effects on material removal rate and surface roughness were analyzed. The results showed that the material removal rate and surface roughness are 0.977μm/min and 153.67nm respectively when the spindle speed is 8000r/min， the feed speed is 0.0150mm/s and the axial ultrasonic amplitude is 5μm. Polyurethane polishing pads have relatively little wear in the first 30 min， the surface of the polishing pads is filled with abrasive particles and optical glass debris， as the polishing time increases， damaging the porous structure of polishing pads. The surface of the polishing pads gradually hardens and loses its elasticity. Meanwhile， the abrasive particles and the debris invading the surface of the polishing pads will prevent the renewal of the abrasive particles in the contact area during the polishing， resulting in a reduction in the polishing quality.

Key words: ultrasonic vibration-assisted polishing (UVAP); micro-morphology; wear of polishing pads; optical glass (BK7); polyurethane polishing pad

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