东北大学学报（自然科学版）

东北大学学报(自然科学版) ›› 2011, Vol. 32 ›› Issue (12): 1753-1756.DOI: -

• 论著 • 上一篇    下一篇

银掺杂氧化锌薄膜的溶胶-凝胶法制备及表征

李建昌;姜永辉;单麟婷;巴德纯;   

  1. 东北大学机械工程与自动化学院;
  • 收稿日期:2013-06-19 修回日期:2013-06-19 发布日期:2013-04-04
  • 通讯作者: -
  • 作者简介:-
  • 基金资助:
    教育部留学回国人员科研启动基金资助项目(20091341-4);教育部高等学校博士学科点专项科研基金资助项目(20100042120023);;

Preparation and characterization of Ag doped ZnO thin films by sol-gel method

Li, Jian-Chang (1); Jiang, Yong-Hui (1); Shan, Lin-Ting (1); Ba, De-Chun (1)   

  1. (1) School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China
  • Received:2013-06-19 Revised:2013-06-19 Published:2013-04-04
  • Contact: Li, J.-C.
  • About author:-
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摘要： 采用溶胶-凝胶法,通过改变硝酸银与醋酸锌的物质的量比分别在Si,ITO和玻璃基片上制备出不同Ag掺杂浓度的ZnO薄膜.利用X射线衍射仪、扫描电子显微镜、紫外可见光分光光度计、伏安特性曲线等测试手段,表征了薄膜的结晶状况、表面形貌及光电特性等.结果表明:随Ag元素的引入及掺杂浓度的升高,ZnO薄膜中有Ag单质生成,并在波长404 nm处出现了由Ag单质颗粒引起的共振吸收峰,同时ZnO薄膜的导电性得到了明显改善,在可见光范围内薄膜透光率均在85%以上.Ag掺杂原子数分数为7%时,薄膜导电性最好,其在可见光范围内透光率高达90%.

关键词: 溶胶-凝胶法, 氧化锌薄膜, Ag掺杂, 光电特性, 表面形貌

Abstract: Ag-doped ZnO thin films were fabricated on silicon substrate with different Agdoping concentrations by sol-gel method. The samples were characterized by X-ray diffraction, scanning electron microscopy, ultraviolet-visible spectrophotometer and current-voltage measurement, respectively. The effects of Ag doping on the structure, surface topography and electrical properties of ZnO thin films were investigated. The results showed that the elemental Ag is generated in ZnO thin films with the addition of Ag and the increasing of the doping concentration, and a new absorption peak appears at 404nm, which is probably induced by the formation of Ag nano-particles. At the same time, the conductivity of Ag-doped ZnO thin films is obviously improved and the film transmittance in the visible region is all above 85%. When the doping concentration is 7at%, the sample shows the best conductivity with visible transmittance greater than 90%.

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