应用于PECVD过渡流模拟的NS/DSMC双向耦合方法特性研究
刘万锁, 岳向吉, 蔺增
Study on Characteristics of NS/DSMC Two-Way Coupling Method Applied to Transition Flow Simulation in PECVD
LIU Wan-suo, YUE Xiang-ji, LIN Zeng
东北大学学报(自然科学版)
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2023, (11): 1591
-1596
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DOI: 10.12068/j.issn.1005-3026.2023.11.011