东北大学学报（自然科学版）

东北大学学报（自然科学版） ›› 2023, Vol. 44 ›› Issue (11): 1591-1596.DOI: 10.12068/j.issn.1005-3026.2023.11.011

• 机械工程 • 上一篇    下一篇

应用于PECVD过渡流模拟的NS/DSMC双向耦合方法特性研究

刘万锁， 岳向吉， 蔺增   

  1. (东北大学 机械工程与自动化学院， 辽宁 沈阳110819)
  • 发布日期:2023-12-05
  • 通讯作者: 刘万锁
  • 作者简介:刘万锁(1989-)，男，辽宁抚顺人，东北大学博士研究生； 蔺增(1975-)，男，山东莱芜人，东北大学教授，博士生导师.
  • 基金资助:
    国家自然科学基金资助项目 (51775096).

Study on Characteristics of NS/DSMC Two-Way Coupling Method Applied to Transition Flow Simulation in PECVD

LIU Wan-suo， YUE Xiang-ji， LIN Zeng   

  1. School of Information Science & Engineering， Northeastern University， Shenyang 110819， China.
  • Published:2023-12-05
  • Contact: LIN Zeng
  • About author:-
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摘要： 将纳维-斯托克斯(NS)方程方法与直接模拟蒙特卡罗(DSMC)方法耦合以实现过渡流态计算.相对过去欠缺反馈机制的单向耦合方法，提出以NS，DSMC速度场相互修正边界值的方法实现双向耦合方法的反馈机制，这对于非稳态研究和数值修正十分重要.结果表明，双向耦合结果与全局DSMC结果有高相似性，相对单向耦合具有更高的效率、稳定性及精度，提高耦合强度可以提升稳定性与精度.双向耦合通过采用全局NS结果边界值获得更高的子域收敛性、稳定性及精度.提出超前演算方法可以增强DSMC域的时间耦合性，为非稳态计算奠定基础.

关键词: NS/DSMC方法；双向耦合；过渡流；超前演算；PECVD

Abstract: The Navier-Stokes(NS)method is coupled with the direct simulation Monte Carlo(DSMC) method to calculate the transition flow. The feedback mechanism of the two-way coupling method is realized by using the method of mutually modifying the boundary value of NS and DSMC， which is very important for non-steady state research and numerical correction. The results show that the two-way coupling results are highly similar to the global DSMC results， and have higher efficiency， stability， and accuracy than the one-way coupling. Improving the coupling frequency can improve stability and accuracy. The two-way coupling obtains higher subdomain convergence， stability， and accuracy by using the boundary value of global NS results. The foresight algorithm can enhance the time coupling of the DSMC domain and lay the foundation for non-steady state calculations.

Key words: NS/DSMC method; two-way coupling; transition flow; foresight algorithm; PECVD (plasma enhanced chemical vapor deposition)

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