东北大学学报:自然科学版 ›› 2019, Vol. 40 ›› Issue (8): 1166-1171.DOI: 10.12068/j.issn.1005-3026.2019.08.019

• 资源与土木工程 • 上一篇    下一篇

PEG/WCl6添加比例对WO3薄膜形貌及气敏特性的影响

周鹏飞, 赵思凯, 王玮, 沈岩柏   

  1. (东北大学 资源与土木工程学院, 辽宁 沈阳110819)
  • 收稿日期:2018-07-16 修回日期:2018-07-16 出版日期:2019-08-15 发布日期:2019-09-04
  • 通讯作者: 周鹏飞
  • 作者简介:周鹏飞(1992-), 男, 河北邯郸人, 东北大学博士研究生; 沈岩柏(1978-),男,黑龙江密山人,东北大学教授,博士生导师.
  • 基金资助:
    国家自然科学基金资助项目(51674067, 51422402); 中央高校基本科研业务费专项资金资助项目(N150101001,N160106004,N170106005).

Influence of PEG/WCl6 Ratio on the Morphology and Gas Sensing Properties of WO3 Thin Films

ZHOU Peng-fei, ZHAO Si-kai, WANG Wei, SHEN Yan-bai   

  1. School of Resources & Civil Engineering, Northeastern University, Shenyang 110819, China.
  • Received:2018-07-16 Revised:2018-07-16 Online:2019-08-15 Published:2019-09-04
  • Contact: SHEN Yan-bai
  • About author:-
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摘要: 以氯化钨(WCl6)、无水乙醇(C2H5OH)和二甲基甲酰胺(C3H7NO)为前驱体,以聚乙二醇(PEG-1000)为造孔剂,采用非水解溶胶-凝胶法制备WO3多孔薄膜,考察了PEG与WCl6添加比例对薄膜形貌结构和气敏特性的影响.结果表明,在PEG与WCl6添加比例为0.5时可获得形貌均一、孔隙率高、比表面积大的WO3多孔薄膜.所获WO3薄膜具有单一的单斜晶系结构,主要由直径为20~60nm的纳米颗粒所构成.气敏特性研究结果表明,WO3多孔薄膜呈现n型半导体特性,在最佳工作温度100℃时表现出对NO2良好的气敏性能;WO3薄膜的成膜机理表明,造孔剂PEG-1000引导无机材料形成高孔隙率和高比表面积的三维多孔薄膜结构,该多孔结构有望作为NO2气体的潜在气敏材料.

关键词: 非水解溶胶-凝胶法, PEG, WO3薄膜, 气敏特性, 成膜机理

Abstract: WO3 thin films were synthesized by a non-hydrolytic sol-gel(NHSG)method in the presence of WCl6, C2H5OH and C3H7NO as the precursor as well as the PEG-1000 as the pore former. The influence of PEG/WCl6 ratio on the morphology and gas sensing properties of WO3 thin films were investigated.It is shown that WO3 thin films with uniform morphology, high porosity and large specific surface area were obtained at the PEG/WCl6 ratio of 0.5. The obtained thin films have a single monoclinic crystal structure and consist of WO3 crystalline nanoparticles with the diameters of 20~60nm. The gas sensing measurements indicate that WO3 thin films show n-type semiconductor characteristics and demonstrate excellent gas sensing properties at the optimal operation temperature of 100℃. The film formation mechanism of WO3 thin films indicates that PEG-1000 may induce the inorganic material to form a three-dimensional porous film structure with high porosity and large specific surface area. The obtained WO3 porous films are potential sensing materials for the detection of NO2.

Key words: NHSG, PEG, WO3 thin film, gas sensing property, film formation mechanism

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