东北大学学报:自然科学版 ›› 2014, Vol. 35 ›› Issue (7): 1019-1022.DOI: 10.12068/j.issn.1005-3026.2014.07.024

• 资源与土木工程 • 上一篇    下一篇

TeO2纳米线的制备及其室温NO2气敏特性

沈岩柏,魏德洲,马嘉伟,张宝庆   

  1. (东北大学 资源与土木工程学院, 辽宁 沈阳110819)
  • 收稿日期:2013-07-01 修回日期:2013-07-01 出版日期:2014-07-15 发布日期:2014-04-11
  • 通讯作者: 沈岩柏
  • 作者简介:沈岩柏(1978-),男,黑龙江密山人,东北大学副教授;魏德洲(1956-),男,河南南阳人,东北大学教授,博士生导师.
  • 基金资助:
    中央高校基本科研业务费专项资金资助项目(N120501002);辽宁省高等学校优秀人才支持计划项目(LJQ2013025);教育部高等学校博士学科点专项科研基金资助项目(20130042120033);教育部留学回国人员科研启动基金资助项目(47-3);东北大学引进人才科研启动项目(26333008).

Preparation and RoomTemperature NO2 Sensing Properties of TeO2 Nanowires

SHEN Yanbai, WEI Dezhou, MA Jiawei, ZHANG Baoqing   

  1. School of Resources & Civil Engineering, Northeastern University, Shenyang 110819, China.
  • Received:2013-07-01 Revised:2013-07-01 Online:2014-07-15 Published:2014-04-11
  • Contact: SHEN Yanbai
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摘要: 以金属Te颗粒为原料,采用热蒸发法于镀金硅基板表面制备出TeO2纳米线,并以其为气敏材料制备成气敏元件.采用XRD,SEM和TEM表征TeO2纳米线的相组成和微观结构,结果表明,TeO2纳米线具有单一的四方相晶体结构,长度约为几十微米,直径约为80~600nm.在TeO2纳米线的顶端未发现Au颗粒,表明TeO2纳米线按照气-固机制进行生长.气敏特性的研究结果表明,TeO2纳米线呈现p型半导体特性,在室温条件下对NO2气体具有良好的响应,气体灵敏度与NO2气体体积分数呈线性增加关系.最后对气敏机制进行了初步探讨.

关键词: 二氧化碲, 纳米线, 二氧化氮, 气体传感器, 气敏特性

Abstract: TeO2 nanowires were synthesized on Aucoated Si substrate by thermal evaporation using Te metal as the source material. The gas sensor was prepared by using TeO2 nanowires as the sensing material. Microstructural characterization by means of XRD, SEM and TEM showed that TeO2 nanowires were single phase of tetragonal structure. The nanowires were approximately several tens of micrometers in length and 80~600nm in diameter. No Au particles existed at the top of TeO2 nanowires, revealing that the growth of TeO2 nanowires occurred in vaporsolid mechanism. The gas sensing measurements indicated that TeO2 nanowires showed a ptype electrical conduction and reversible response to NO2 gas at room temperature. The sensitivity showed a linear increase with the increasing of NO2 gas volume fraction. The gas sensing mechanism of TeO2 nanowire sensor was investigated preliminarily.

Key words: tellurium dioxide, nanowire, nitrogen dioxide, gas sensor, gas sensing property

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