东北大学学报（自然科学版）

东北大学学报:自然科学版 ›› 2014, Vol. 35 ›› Issue (2): 166-169.DOI: 10.12068/j.issn.1005-3026.2014.02.004

• 信息与控制 • 上一篇    下一篇

微纳米压电陶瓷驱动器的迟滞特性建模

魏阳杰，吴成东   

  1. (东北大学 信息科学与工程学院， 辽宁 沈阳110819)
  • 收稿日期:2013-05-30 修回日期:2013-05-30 出版日期:2014-02-15 发布日期:2013-11-22
  • 通讯作者: 魏阳杰
  • 作者简介:魏阳杰(1978-)，女，辽宁沈阳人，东北大学副教授，博士;吴成东(1960-)，男，辽宁大连人，东北大学教授，博士生导师.
  • 基金资助:
    国家自然科学基金资助项目(61273078).

Modeling of Hysteresis Behavior for Micro/Nano Piezoelectric Actuator

WEI Yangjie， WU Chengdong   

  1. School of Information Science & Engineering， Northeastern University， Shenyang 110819， China.
  • Received:2013-05-30 Revised:2013-05-30 Online:2014-02-15 Published:2013-11-22
  • Contact: WEI Yangjie
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摘要： 为了高精度地测量微纳米压电陶瓷的驱动特性，研究了一种基于最优模板尺寸的改进图像块匹配位移测量算法；结合Preisach模型，建立了压电陶瓷驱动器迟滞特性模型.首先，研究了不同模板尺寸对位移测量精度的影响，得到了基于标准模板的最优模板尺寸；然后，介绍了Preisach模型用于压电陶瓷驱动器迟滞建模的原理；最后，使用纳米平台系统验证了改进的亚像素模板匹配算法和迟滞特性建模方法的有效性和准确性.

关键词: 压电陶瓷驱动器, 迟滞特性, 图像块匹配, Preisach模型, 最优模板尺寸

Abstract: In order to precisely measure the actuation property of a piezoelectric actuator(PA) on micro/nano scale， an improved subpixel block matching algorithm with an optimal block size was used to measure micro/nano displacement， and combined with the Preisach model， a new hysteresis modeling method was proposed. First， the relationship between block size and measurement precision was investigated and the optimal block size was obtained with respect to a standard block. Then， the Preisach model was introduced to model the hysteresis behavior of a piezoelectric actuator. Finally， experiments with a nanometer movement platform system showed the feasibility and validity of the proposed method.

Key words: piezoelectric actuator, hysteresis behavior, image block matching, Preisach model, optimal block size

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