NdFeB基底温度对TiN防护膜耐腐蚀性的影响

doi:10.12068/j.issn.1005-3026.2021.11.007

东北大学学报（自然科学版） ›› 2021, Vol. 42 ›› Issue (11): 1562-1568.DOI: 10.12068/j.issn.1005-3026.2021.11.007

NdFeB基底温度对TiN防护膜耐腐蚀性的影响

谢元华¹，邓文宇²，王朋阳¹，万亿¹

(1. 东北大学机械工程与自动化学院，辽宁沈阳110819; 2. 沈阳中北通磁科技股份有限公司，辽宁沈阳110168)

修回日期:2020-06-15 接受日期:2020-06-15 发布日期:2021-11-19
通讯作者: 谢元华
作者简介:谢元华(1979-)，男，湖南张家界人，东北大学副教授.
基金资助:
中央高校基本科研业务费专项资金资助项目(N2103027)；辽宁省科技重大专项(2019JH1/10100016)；辽宁省稀土永磁材料专业技术创新中心/2019年度沈阳市高层次人才创新创业团队项目(2019-SYRCCX-D-01).

Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film

XIE Yuan-hua¹， DENG Wen-yu²， WANG Peng-yang¹， WAN Yi¹

1. School of Mechanical Engineering & Automation， Northeastern University， Shenyang 110819， China; 2. Shenyang General Magnetic Co.， Ltd.， Shenyang 110168， China.

Revised:2020-06-15 Accepted:2020-06-15 Published:2021-11-19
Contact: XIE Yuan-hua
About author:-
Supported by:
-

摘要/Abstract

摘要： 在钕铁硼(NdFeB)稀土永磁体腐蚀防护过程中，针对基底温度对TiN防护膜防护效果影响较大的问题，采用磁控溅射技术在NdFeB永磁体表面沉积TiN防护膜，通过场发射扫描电镜(FESEM)、X射线衍射(XRD)、电化学检测及永磁无损检测等手段对样品进行表征，分析基底温度对TiN膜微观结构及腐蚀防护性能的影响.结果表明:基底温度对TiN薄膜性能影响较大，温度的升高有助于晶粒生长，TiN(111)晶面取向更加明显;腐蚀测试结果显示基底温度300℃时耐腐蚀性最强，但磁性能损失最大.基底温度在100℃时TiN膜层的耐腐蚀性能较强，磁性能损失较小，对基底具有最佳的防护效果.

关键词: 磁控溅射;TiN;基底温度;耐腐蚀性;磁性能

Abstract: In the process of NdFeB rare-earth permanent magnet corrosion protection， the substrate temperature of TiN protective membrane takes a great influence on protective effect. The magnetron sputtering technology was carried out to deposit TiN film on NdFeB permanent magnet surface and the effects of substrate temperature on the microstructure and corrosion protection performance of TiN film were studied through FESEM， XRD， electrochemical detection and permanent magnetic nondestructive testing technologies. The results showed that the substrate temperature had a great influence on the film’s property. The increase of temperature was conducive to the growth of grain and to promote the TiN (111) texture. It was found that the corrosion resistance of the film was the strongest at the substrate temperature of 300℃ with the greatest loss of magnetic property. When the substrate temperature was 100℃， the film had the best protective performance on the substrate， associated with a stronger corrosion resistance and less loss of magnetic property.

Key words: magnetron sputtering; TiN; substrate temperature; corrosion resistance; magnetic properties

中图分类号:

TM273
TB304

谢元华，邓文宇，王朋阳，万亿. NdFeB基底温度对TiN防护膜耐腐蚀性的影响[J]. 东北大学学报（自然科学版）, 2021, 42(11): 1562-1568.

XIE Yuan-hua， DENG Wen-yu， WANG Peng-yang， WAN Yi. Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film[J]. Journal of Northeastern University(Natural Science), 2021, 42(11): 1562-1568.

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NdFeB基底温度对TiN防护膜耐腐蚀性的影响

Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film

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