微型溅射离子泵的阳极筒长度对抽气特性的影响

doi:10.12068/j.issn.1005-3026.2023.11.012

摘要/Abstract

摘要： 基于粒子云网格法与蒙特卡罗法，使用VSim软件对微型溅射离子泵内部潘宁放电的工作过程进行了分析.建立了二维仿真模型并得到了氮气离子入射阴极板时的入射能量、入射角度和入射位置等参数.将非垂直溅射产额理论与仿真得到的结果相结合，分析了阴极板上溅射产额的分布规律.根据离子入射参数与溅射产额，计算得到了微型溅射离子泵对氮气的抽速.计算值与实验结果一致性好并且该方法可以给出溅射离子泵抽速阈值对应的压力.仿真结果中增加阳极筒长度可以降低微型溅射离子泵抽速阈值对应的压力，并通过实验证明.

关键词: 潘宁放电；等离子体模拟;蒙特卡罗;溅射产额;抽速

Abstract: Based on the particle-in-cell(PIC)method and the Monte Carlo method， the software of VSim was used to analyze the Penning discharge of the miniature sputter ion pump(SIP). A two-dimensional simulation model was established， and the parameters such as the incident energy， the incident angle， and the incident position on the cathode plate were obtained. The non-vertical sputtering yield theory was combined with the simulation results， and the distribution law of the sputtering yield on the cathode plate was obtained. According to the ion incident parameters and the sputtering yield， the pumping speed of the miniature SIP for nitrogen was calculated. The calculated values are in good agreement with the experimental results， and the method can accurately give the pressure corresponding to the threshold value of the pumping speed. In the simulation results， the length of the anode barrel can effectively reduce the pressure corresponding to the threshold value of the pumping speed. Meanwhile， it was also proved by experiments.

Key words: Penning discharge; plasma simulation; Monte Carlo; sputtering yield; pumping speed

中图分类号:

TB753

耿健，王晓冬，郭美如，任正宜. 微型溅射离子泵的阳极筒长度对抽气特性的影响[J]. 东北大学学报（自然科学版）, 2023, 44(11): 1596-1603.

GENG Jian， WANG Xiao-dong， GUO Mei-ru， REN Zheng-yi. Effects of the Length of the Anode Cylinder in the Miniature Sputter Ion Pump on the Pumping Characteristics[J]. Journal of Northeastern University(Natural Science), 2023, 44(11): 1596-1603.

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