东北大学学报（自然科学版）

东北大学学报(自然科学版) ›› 2010, Vol. 31 ›› Issue (10): 1410-1413.DOI: -

• 论著 • 上一篇    下一篇

下底层Ti引导制备Co-Pt垂直磁记录薄膜的研究

肖娜;裴文利;赵骧;秦高梧;   

  1. 东北大学材料各向异性与织构教育部重点实验室;
  • 收稿日期:2013-06-20 修回日期:2013-06-20 出版日期:2010-10-15 发布日期:2013-06-20
  • 通讯作者: -
  • 作者简介:-
  • 基金资助:
    教育部新世纪优秀人才计划项目(NCET-10-0153),教育部科技重点资助项目(108039);;

Co-Pt perpendicular magnetic recording film induced by Ti underlayer

Xiao, Na (1); Pei, Wen-Li (1); Zhao, Xiang (1); Qin, Gao-Wu (1)   

  1. (1) Key Laboratory for Anisotropy and Texture of Materials (Ministry of Education), Northeastern University, Shenyang 110004, China
  • Received:2013-06-20 Revised:2013-06-20 Online:2010-10-15 Published:2013-06-20
  • Contact: Qin, G.-W.
  • About author:-
  • Supported by:
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摘要： 在加热的玻璃基板上,通过磁控溅射的方法沉积金属Ti作为下底层,然后沉积不同成分的Co1-x-Ptx(x=0,15%,26%,35%)磁性薄膜.利用振动样品磁强计(VSM)和X射线衍射技术(XRD)分析了薄膜的磁性能和晶体结构.结果表明Pt原子分数对Co-Pt晶格常数有重要影响,随着Pt原子分数的增加,Co晶格常数(a,c)增大,从而减小Co-Pt与下底层Ti在(00.2)晶面之间的错配度,有利于c轴取向垂直膜面排列,获得了较好的磁性能.引入Ti和SiO2共溅射制备下底层,研究发现随着SiO2体积分数的增加,Co-Pt薄膜的垂直磁性能得到改善.

关键词: Co-Pt合金, 取向, Ti下底层, 晶格常数, 晶粒尺寸

Abstract: The magnetic Co1-x-Ptx thin films with different Pt atom fractions (x:0,15%,26%,35%) were deposited on the Ti underlayer which was deposited first on the glass substrate heated at 300°C by DC magnetron sputtering. The crystal structure and magnetic properties of the films were investigated by XRD and VSM, respectively. The results showed that the Pt atom fraction affects greatly the lattice constants of Co-Pt. With the increasing Pt atom fraction, the lattice constants of Co (a,c) increase, thus reducing the lattice mismatching between Co-Pt and Ti underlayer on the (00.2) crystal plane and benefiting the c-axis orientation to be perpendicular to the film surface. In this way the better magnetic properties can be obtained. With the co-sputtering process of Ti and SiO2 introduced to prepare the underlayer, it was found that the perpendicular magnetic properties of Co-Pt film can be improved with increasing SiO2 volume fraction.

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