东北大学学报（自然科学版）

东北大学学报:自然科学版 ›› 2014, Vol. 35 ›› Issue (8): 1183-1188.DOI: 10.12068/j.issn.1005-3026.2014.08.027

• 机械工程 • 上一篇    下一篇

整体式半导体自动物料搬运系统解死锁算法

周琪，周炳海   

  1. (同济大学 机械与能源工程学院， 上海201804)
  • 收稿日期:2013-06-20 修回日期:2013-06-20 出版日期:2014-08-15 发布日期:2014-04-11
  • 通讯作者: 周琪
  • 作者简介:周琪(1989-)，女，浙江宁波人，同济大学博士研究生；周炳海(1965-)，男，浙江浦江人，同济大学教授，博士生导师.
  • 基金资助:
    国家自然科学基金资助项目(61273035)；2013“大型智能化装卸码头”智能制造装备发展专项.

Deadlock Recovery Algorithm for Unified AMHS in Semiconductor FAB

ZHOU Qi， ZHOU Binghai   

  1. School of Mechanical Engineering， Tongji University， Shanghai 201804， China.
  • Received:2013-06-20 Revised:2013-06-20 Online:2014-08-15 Published:2014-04-11
  • Contact: ZHOU Binghai
  • About author:-
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摘要： 为了有效地解决300mm晶圆制造中整体式自动物料搬运系统的设备缓冲约束引起死锁的问题，构建了基于图论的两阶段解死锁算法.首先对问题域进行了形式化描述，在此基础上，证明了死锁产生和解除的充分条件，以关键设备死锁解除时间最小化为目标，建立了数学规划模型，并构造了解死锁算法.该启发式算法使用存储柜转存晶圆批来释放死锁的小车资源，并应用图论理论构造了多个并行路径来解除死锁.最后，对算法进行了仿真实验，结果表明该算法能有效求解设备缓冲约束引起的死锁问题.与其他解死锁方法相比，上述算法能有效减少解死锁时间，提高了关键设备的可用率.

关键词: 死锁, 自动物料搬运系统, 整体式布局, 图论, 缓冲约束

Abstract: To recover from deadlocks which occur in bufferconstrained tools in the united automatic material handling system of 300mm semiconductor wafer fabrications， a twostage algorithm based on the graph theory was proposed. The mentioned deadlock problems were formulated， and then sufficient conditions of the deadlock happening and recovery were determined. A mathematical programming model was set up with the objective function of minimizing the deadlock recovery time of critical tools， and a heuristic algorithm for deadlock recovery was put forward. A stocker’s buffer was used to stock wafer lots to release deadlocked resources， and several parallel routes according to the graph theory were constructed to recover from deadlock. Simulation results indicated the effectiveness of the proposed method. It can reduce average deadlock recovery time and improve the utilization of critical tools， compared with other methods.

Key words: deadlock, automatic material handling system (AMHS), unified layout, graph theory, bufferconstraint

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