PEG/WCl6添加比例对WO3薄膜形貌及气敏特性的影响

doi:10.12068/j.issn.1005-3026.2019.08.019

东北大学学报:自然科学版 ›› 2019, Vol. 40 ›› Issue (8): 1166-1171.DOI: 10.12068/j.issn.1005-3026.2019.08.019

PEG/WCl₆添加比例对WO₃薄膜形貌及气敏特性的影响

周鹏飞，赵思凯，王玮，沈岩柏

(东北大学资源与土木工程学院，辽宁沈阳110819)

收稿日期:2018-07-16 修回日期:2018-07-16 出版日期:2019-08-15 发布日期:2019-09-04
通讯作者: 周鹏飞
作者简介:周鹏飞(1992-)，男，河北邯郸人，东北大学博士研究生；沈岩柏(1978-)，男，黑龙江密山人，东北大学教授，博士生导师.
基金资助:
国家自然科学基金资助项目(51674067， 51422402); 中央高校基本科研业务费专项资金资助项目(N150101001，N160106004，N170106005).

Influence of PEG/WCl₆ Ratio on the Morphology and Gas Sensing Properties of WO₃ Thin Films

ZHOU Peng-fei， ZHAO Si-kai， WANG Wei， SHEN Yan-bai

School of Resources & Civil Engineering， Northeastern University， Shenyang 110819， China.

Received:2018-07-16 Revised:2018-07-16 Online:2019-08-15 Published:2019-09-04
Contact: SHEN Yan-bai
About author:-
Supported by:
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摘要/Abstract

摘要： 以氯化钨(WCl₆)、无水乙醇(C₂H₅OH)和二甲基甲酰胺(C₃H₇NO)为前驱体，以聚乙二醇(PEG-1000)为造孔剂，采用非水解溶胶-凝胶法制备WO₃多孔薄膜，考察了PEG与WCl₆添加比例对薄膜形貌结构和气敏特性的影响.结果表明，在PEG与WCl₆添加比例为0.5时可获得形貌均一、孔隙率高、比表面积大的WO₃多孔薄膜.所获WO₃薄膜具有单一的单斜晶系结构，主要由直径为20~60nm的纳米颗粒所构成.气敏特性研究结果表明，WO₃多孔薄膜呈现n型半导体特性，在最佳工作温度100℃时表现出对NO₂良好的气敏性能；WO₃薄膜的成膜机理表明，造孔剂PEG-1000引导无机材料形成高孔隙率和高比表面积的三维多孔薄膜结构，该多孔结构有望作为NO₂气体的潜在气敏材料.

关键词: 非水解溶胶-凝胶法, PEG, WO₃薄膜, 气敏特性, 成膜机理

Abstract: WO₃ thin films were synthesized by a non-hydrolytic sol-gel(NHSG)method in the presence of WCl₆， C₂H₅OH and C₃H₇NO as the precursor as well as the PEG-1000 as the pore former. The influence of PEG/WCl₆ ratio on the morphology and gas sensing properties of WO₃ thin films were investigated.It is shown that WO₃ thin films with uniform morphology， high porosity and large specific surface area were obtained at the PEG/WCl₆ ratio of 0.5. The obtained thin films have a single monoclinic crystal structure and consist of WO₃ crystalline nanoparticles with the diameters of 20~60nm. The gas sensing measurements indicate that WO₃ thin films show n-type semiconductor characteristics and demonstrate excellent gas sensing properties at the optimal operation temperature of 100℃. The film formation mechanism of WO₃ thin films indicates that PEG-1000 may induce the inorganic material to form a three-dimensional porous film structure with high porosity and large specific surface area. The obtained WO₃ porous films are potential sensing materials for the detection of NO₂.

Key words: NHSG, PEG, WO₃ thin film, gas sensing property, film formation mechanism

中图分类号:

TP212

周鹏飞，赵思凯，王玮，沈岩柏. PEG/WCl₆添加比例对WO₃薄膜形貌及气敏特性的影响[J]. 东北大学学报:自然科学版, 2019, 40(8): 1166-1171.

ZHOU Peng-fei， ZHAO Si-kai， WANG Wei， SHEN Yan-bai. Influence of PEG/WCl₆ Ratio on the Morphology and Gas Sensing Properties of WO₃ Thin Films[J]. Journal of Northeastern University Natural Science, 2019, 40(8): 1166-1171.

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PEG/WCl₆添加比例对WO₃薄膜形貌及气敏特性的影响

Influence of PEG/WCl₆ Ratio on the Morphology and Gas Sensing Properties of WO₃ Thin Films

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