流量计法测量微型溅射离子泵抽速的方法

doi:10.12068/j.issn.1005-3026.2022.09.012

东北大学学报（自然科学版） ›› 2022, Vol. 43 ›› Issue (9): 1298-1305.DOI: 10.12068/j.issn.1005-3026.2022.09.012

流量计法测量微型溅射离子泵抽速的方法

耿健^1,2，王晓冬¹，郭美如¹，黄海龙¹

(1. 东北大学机械工程与自动化学院，辽宁沈阳110819； 2. 兰州空间技术物理研究所真空技术与物理重点实验室，甘肃兰州730000)

发布日期:2022-09-16
通讯作者: 耿健
作者简介:耿健(1992-)，男，辽宁阜新人，东北大学博士研究生; 王晓冬(1963-)，男，辽宁沈阳人，东北大学教授，博士生导师.
基金资助:
国家自然科学基金资助项目(61971209)；国家重大科学仪器设备开发专项(2017YFF0105801).

Flowmeter Method of Measuring the Pumping Speed of Miniature Sputter Ion Pump

GENG Jian^1,2， WANG Xiao-dong¹， GUO Mei-ru¹， HUANG Hai-long¹

1. School of Mechanical Engineering & Automation， Northeastern University， Shenyang 110819， China; 2. Science and Technology on Vacuum Technology and Physics Laboratory， Lanzhou Institute of Physics， Lanzhou 730000， China.

Published:2022-09-16
Contact: WANG Xiao-dong
About author:-
Supported by:
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摘要/Abstract

摘要： 介绍了基于流量计法原理搭建的抽速测量装置.在1×10^-4~1×10^-2Pa下使用磁悬浮转子真空计测量压力，当压力低于1×10^-4Pa时使用电离真空计测量压力.提出了一种测量电离真空计抽速与放气率的方法，测量了电离真空计在1×10^-6~1×10^-4Pa压力下的抽速与放气率.在搭建好的设备上，测量了微型溅射离子泵对氮气和氦气的抽速.使用COMSOL软件分析了不同压力下泵的放电状态并与实验结果进行对比，所得结果一致性好.流量计法的相对标准不确定度低于4.4%

关键词: 溅射离子泵；极小抽速；不确定度；仿真分析；潘宁放电

Abstract: The pumping speed measuring apparatus， which employs the flowmeter method， was introduced. The pressure was measured by using a spinning rotor gauge(SRG) under 1×10^-4 to 1×10^-2Pa， and the ionization vacuum gauge was used when the pressure was lower than 10^-4Pa. A method of measuring the pumping speed and the outgassing rate of the extractor gauge was given. The pumping speed and the outgassing rate of the extractor gauge were measured under the pressure of 10^-6 to 10^-4Pa. The flowmeter method was used to measure the pumping speed of the miniature sputter ion pump(SIP)in nitrogen and helium. The discharge state of the miniature SIP under different pressures was analyzed using COMSOL， and the experimental results were in good agreement with the theoretical analysis. The combined standard uncertainty of the flowmeter method was less than 4.4%.

Key words: sputter ion pump(SIP); low pumping speed; uncertainty; simulated analysis; penning discharge

中图分类号:

TB753

耿健，王晓冬，郭美如，黄海龙. 流量计法测量微型溅射离子泵抽速的方法[J]. 东北大学学报（自然科学版）, 2022, 43(9): 1298-1305.

GENG Jian， WANG Xiao-dong， GUO Mei-ru， HUANG Hai-long. Flowmeter Method of Measuring the Pumping Speed of Miniature Sputter Ion Pump[J]. Journal of Northeastern University(Natural Science), 2022, 43(9): 1298-1305.

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流量计法测量微型溅射离子泵抽速的方法

Flowmeter Method of Measuring the Pumping Speed of Miniature Sputter Ion Pump

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