聚晶金刚石微铣刀制备及其蓝宝石微铣削工艺实验

doi:10.12068/j.issn.1005-3026.2025.20249032

摘要/Abstract

摘要：

利用电火花车削工艺非接触且不受材料强度和硬度限制的特性，制备出直径小于1 mm的聚晶金刚石单刃螺旋微铣刀；建立电火花车削聚晶金刚石螺旋微铣刀的刀体结构与进给速度、转速间的内在联系及微铣刀形貌仿真模型，解决了直径小于1 mm聚晶金刚石螺旋微铣刀的实际制备难题.采用该工艺制备的聚晶金刚石微铣刀进行蓝宝石微铣削实验，研究微铣削参数对蓝宝石三维表面粗糙度S_a，S_z和三向微铣削力的影响规律；通过加工表面质量、微铣削力和刀具磨损分析，评价电火花车削制备的聚晶金刚石微铣刀的微铣削性能.结果表明：聚晶金刚石单刃螺旋微铣刀微铣削蓝宝石材料的面粗糙度S_a可稳定控制在0.76~1.00 μm，刀具磨损形式以微铣刀底面破损为主.

关键词: 聚晶金刚石微铣刀, 电火花车削, 微铣削, 蓝宝石, 微铣削力

Abstract:

The polycrystalline diamond single-edged helical micro end mill with a diameter of less than 1 mm was fabricated using electrical discharge turning technology featuring non-contact and independence from material strength and hardness limitations. The intrinsic relationship of the tool structure of the polycrystalline diamond spiral micro end mill by electrical discharge turning relative to the feed speed and rotational speed was established， as well as the morphological simulation model of the micro end mill， which successfully solved the difficulties in preparing a polycrystalline diamond helical micro end mill with the diameter of less than 1 mm in the actual machining. The prepared polycrystalline diamond micro end mill was used to carry out experimental research on the micro-milling process of sapphire， and the influence of micro-milling parameters on the three-dimensional surface roughness S_a， S_z， and the triaxial micro-milling force of sapphire was investigated. Moreover， the surface quality， micro-milling force， and tool wear were analyzed to evaluate the micro-milling performance of the polycrystalline diamond micro end mill prepared by electrical discharge turning. The results indicate that the surface roughness S_a of the sapphire processed by the polycrystalline diamond single-edged helical micro end mill can be stably controlled within the range of 0.76~1.00 μm， and the tool wear mode is primarily characterized by damage to the bottom surface of the micro end mill.

Key words: polycrystalline diamond micro end mill, electrical discharge turning, micro-milling, sapphire, micro-milling force

中图分类号:

TH 161

巩思茜, 孙瑶, 李思慧. 聚晶金刚石微铣刀制备及其蓝宝石微铣削工艺实验[J]. 东北大学学报（自然科学版）, 2025, 46(12): 78-84.

Si-qian GONG, Yao SUN, Si-hui LI. Preparation of Polycrystalline Diamond Micro End Mill and Experiment of Its Micro-milling Process for Sapphire[J]. Journal of Northeastern University(Natural Science), 2025, 46(12): 78-84.

图/表 12

图1 阿奇夏米尔CA20低速走丝线切割机床

Fig.1 Agiecharmilles CA20 low-speed wire electrical discharge machine(WEDM) tool

图2 电火花车削单刃螺旋微铣刀刀头的仿真结果（a）—vf =2 mm/s，vn=2 r/min；（b）—vf =4 mm/s，vn=1 r/min.

Fig.2 Simulation results of cutting head of single-edged helical micro end mill for electrical discharge turning

图3 自主开发的微铣削机床和激光共聚焦显微镜（a）—微铣削机床；（b）—激光共聚焦显微镜.

Fig.3 Independently developed micro-milling machine tool and laser confocal microscope

表1 微切削机床技术指标

Table 1 Technical specifications of micro-milling machine tool

机床的技术参数	值
机床主体外形尺寸/mm	360×200×350
X,Y,Z工作台行程/mm	50
全闭环数控系统分辨率/μm	0.01
主轴最高转速/(r·min^-1)	60 000
各向工作台最大速度/(mm·s^-1)	30
各向工作台最大加速度/(mm·s^-2)	2
花岗石平台底座尺寸/mm	1 000×630×750

表2 电火花车削聚晶金刚石单刃螺旋微铣刀参数

Table 2 Parameters of polycrystalline diamond single-edged helical micro end mill using electrical discharge turning

参数名称	符号	单位	数值
冲液压力	p	MPa	0.1
峰值电流	I	A	120
开路电压	U	V	100
脉冲宽度	t_on	μs	13
工件转速	v_n	r/min	2
走丝速度	v_w	mm/s	30
丝张力	F_w	N	15
电极丝进给速度	v_s	mm/min	2

图4 电火花车削聚晶金刚石单刃螺旋微铣刀形貌和表面粗糙度观测结果（a）—聚晶金刚石单刃螺旋微铣刀扫描观测结果；（b）—聚晶金刚石单刃螺旋微铣刀的螺旋槽内的截面轮廓.

Fig.4 Observation results of morphology and surface roughness of polycrystalline diamond single-edged helical micro end mill using electrical discharge turning

图5 微铣削深度对蓝宝石表面形貌的影响（a）—ap=5 μm；（b）—ap =17 μm.

Fig.5 Effect of micro-milling depth on surface topography of sapphire

图6 微铣削进给速度对蓝宝石表面形貌的影响（a）—vf=10 μm/s；（b）—vf=60 μm/s.

Fig.6 Effect of micro-milling feed speed on surface topography of sapphire

图7 微铣削进给速度对蓝宝石表面截面（图6）轮廓形貌的影响规律（a）—vf=10 μm/s；（b）—vf=60 μm/s.

Fig.7 Effect of micro-milling feed speed on surface cross-sectional（Fig.6） profile of sapphire

图8 微铣削进给速度和深度对蓝宝石表面粗糙度Sa和Sz的影响规律

Fig.8 Effects of micro-milling feed speed and depth on surface roughness Sa and Sz of sapphire（a）—进给速度；（b）—微铣削深度.

图9 微铣削进给速度和深度对微铣削力的影响（a）—微铣削进给速度；（b）—微铣削深度.

Fig.9 Effect of micro-milling feed speed and depth on micro-milling force

图10 微铣削加工后聚晶金刚石单刃螺旋微铣刀磨损的表面形貌观测结果（a）—加工后的聚晶金刚石微铣刀二维形貌；（b）—加工后的聚晶金刚石微铣刀局部形貌.

Fig.10 Observation results of wear surface morphology of polycrystalline diamond single-edged helical micro end mill after micro-milling

参考文献 16

[1]	陈明君，陈妮，何宁，等.微铣削加工机理研究的新进展［J］. 机械工程学报，2014，50（5）： 161-172.
	Chen Ming-jun， Chen Ni， He Ning， et al. The research progress of micro-milling in machining mechanism ［J］. Journal of Mechanical Engineering，2014，50（5）：161-172.
[2]	Wang M H， Zhang R Y， Shang Y C， et al. Micro-milling microstructures in air-shielding ultrasonic assisted electrochemical machining［J］. Journal of Manufacturing Processes， 2023， 97： 171-184.
[3]	Jahan M P， Ma J F， Hanson C， et al. Experimental and numerical investigation of cutting forces in micro-milling of polycarbonate glass［J］. Machining Science and Technology， 2020，24（3）：366-397.
[4]	高奇，巩亚东，周云光，等.单晶镍基高温合金DD98微铣削表面质量试验［J］. 东北大学学报（自然科学版）， 2017， 38（3）：385-389.
	Gao Qi， Gong Ya-dong， Zhou Yun-guang， et al. Experiment on surface quality in micro-milling of single crystal Ni-based superalloy DD98［J］.Journal of Northeastern University（Natural Science）， 2017， 38（3）： 385-389.
[5]	Hanson C， Hiwase P， Chen X B， et al. Experimental investigation and numerical simulation of burr formation in micro-milling of polycarbonates［J］. Procedia Manufacturing， 2019， 34：293-304.
[6]	Edem I F， Balogun V A. Sustainability analyses of cutting edge radius on specific cutting energy and surface finish in side milling processes［J］. The International Journal of Advanced Manufacturing Technology， 2018， 95（9）： 3381- 3391.
[7]	Sun Y， Jin L Y， Gong Y D， et al. Experimental evaluation of surface generation and force time-varying characteristics of curvilinear grooved micro end mills fabricated by EDM［J］. Journal of Manufacturing Processes， 2022， 73：799-814.
[8]	Egashira K， Hosono S， Takemoto S， et al. Fabrication and cutting performance of cemented tungsten carbide micro-cutting tools［J］. Precision Engineering， 2011， 35（4）： 547-553.
[9]	Chen G L， Wu Y J E， Cheng J C， et al. Study on burr formation in micro-machining using micro-tools fabricated by micro-EDM ［J］. Precision Engineering， 2007，31（2）： 122-129.
[10]	杨正杰，张勇斌，徐凌羿.微铣刀制备技术与实验研究［J］. 电加工与模具，2016（3）： 56-61.
	Yang Zheng-jie， Zhang Yong-bin， Xu Ling-yi. Preparation technology and experimental study of micro milling tools［J］. Electromachining & Modle， 2016 （3）： 56-61.
[11]	Oliaei S N B， Karpata Y. Fabrication of PCD mechanical planarization tools by using μ-wire electrical discharge machining ［J］.Procedia CIRP， 2016， 42：311-316.
[12]	Cheng X， Wang Z G， Nakamoto K， et al. A study on the micro tooling for micro/nano milling［J］. The International Journal of Advanced Manufacturing Technology， 2011， 53（5）： 523-533.
[13]	Perveen A， San W Y， Rahman M.Fabrication of different geometry cutting tools and their effect on the vertical micro-grinding of BK7 glass［J］. The International Journal of Advanced Manufacturing Technology， 2012， 61（1）： 101-115.
[14]	王琛，郝秀清，刘凌辉，等.基于Deform的大长径比PCD微铣刀结构设计及参数优化［J］.金刚石与磨料磨具工程，2019，39（4）：30-36.
	Wang Chen， Hao Xiu-qing， Liu Ling-hui， et al. Structure design and parameter optimization of PCD micro-milling cutter with large aspect ratio based on deform［J］. Diamond &Abrasives Engineering， 2019， 39 （4）： 30-36.
[15]	陈俊云，刘德辉，张圣康，等.单晶金刚石微铣刀的飞秒激光制造研究［J］.燕山大学学报，2022，46（3）：201-207.
	Chen Jun-yun， Liu De-hui， Zhang Sheng-kang， et al. Research on micro-milling tools of single crystal diamond by femtosecond laser technique［J］. Journal of Yanshan University， 2022， 46（3）：201-207.
[16]	Zhao Y， Liu H G， Yu T B， et al. Fabrication of high hardness micro array diamond tools by femto-second laser ablation［J］. Optics & Laser Technology， 2021， 140： 107014.