Research on Optical Vacuum Measurement Technology Based on Fabry-Perot Cavity

doi:10.12068/j.issn.1005-3026.2023.07.010

Abstract

Abstract: Based on the ab initio theory， the physical parameters such as molar polarization， molar susceptibility and Virial coefficient of argon gas were calculated， and the theoretical parameter model of gas pressure about refractive index was established by combining the Virial equation of state and Lorentz-Lorenz equation. The optical vacuum measuring device based on the Fabry-Perot cavity was used to accurately measure the resonant frequency change of the laser in the Fabry-Perot cavity to obtain the gas refractive index and gas pressure. At 10⁵Pa， the relative uncertainty of the refractive index is 1.8×10^-11， and the relative uncertainty of the gas pressure is 4.4×10^-6. The measured pressures obtained by the optical vacuum measuring device based on the Fabry-Perot cavity and the capacitance film vacuum gauge were compared and analyzed. The results showed that the Fabry-Perot cavity based optical vacuum measuring method has higher stability and accuracy.

Key words: vacuum measurement; quantization; Fabry-Perot cavity; gas refractive index; uncertainty

CLC Number:

TB935

FAN Dong， LI De-tian， XI Zhen-hua， LIU Kun. Research on Optical Vacuum Measurement Technology Based on Fabry-Perot Cavity[J]. Journal of Northeastern University(Natural Science), 2023, 44(7): 989-995.

References

[1]Li D T，Wang Y J，Zhang H Z，et al.Applications of vacuum measurement technology in China’s space programs［J］.Space:Science & Technology，2021，2021(7592858):1-14.
[2]许玉蓉，刘洋洋，王进，等.基于气体折射率方法的真空计量［J］.物理学报，2020，69(15) :150601.(Xu Yu-rong，Liu Yang-yang，Wang Jin，et al.Vacuum metrology based on refractive index of gas［J］.Acta Physica Sinica，2020，69(15):150601.)
[3]Jousten K，Hendricks J，Barker D，et al.Perspectives for a new realization of the pascal by optical methods［J］.Metrologia，2017，54(6):S146-S161.
[4]Forssen C，Silander I，Zakrisson J，et al.Anoptical pascal in Sweden［J］.Journal of Optics，2022，24(3):1-15.
[5]Ricker J，Hendricks J，Egan P，et al.Towards photonic based pascal realization as a primary pressure standard［C］// XXII World Congress of the International Measurement Confederation.Belfast:IEEE，2018:316-323.
[6]李得天，成永军，习振华.量子真空标准研究进展［J］.宇航计测技术，2018，38(3):131-139.(Li De-tian，Cheng Yong-jun，Xi Zhen-hua.Development of quantum vacuum standard［J］.Journal of Astronautic Metrology and Measurement，2018，38(3):131-139.)
[7]TaKei Y，Arai K，Yoshida H，et al.Development of an optical pressure measurement system using an external cavity diode laser with a wide tunable frequency range［J］.Measurement，2020，151:107090.
[8]Silander I，Forssen C，Zakrisson J，et al.Aninvar-based Fabry-Perot cavity refractometer with a gallium fixed-point cell for assessment of pressure［J］.Acta IMEKO，2020，9(5):293-298.
[9]Silvestri Z，Bentouati D，Otal P，et al.Towards an improved helium-based refractometer for pressure measurements［J］.Acta IMEKO，2020，9(5):305-309.
[10]贾文杰，习振华，范栋，等.基于Fabry-Perot激光谐振腔的量子真空计量技术研究［J］.光学学报，2020，40(22):2212005.(Jia Wen-jie，Xi Zhen-hua，Fan Dong，et al.Quantum vacuum measurement based on Fabry-Perot laser resonant cavity［J］.Acta Optica Sinica，2020，40(22) :2212005.)
[11]范栋，习振华，贾文杰，等.量子真空计量标准中的非极性稀薄气体折射率测量研究［J］.物理学报，2021，70(4):040602.(Fan Dong，Xi Zhen-hua，Jia Wen-jie，et al.Refractive index measurement of nonpolar rarefied gas in quantum vacuum metrology standard［J］.Acta Physica Sinica，2021，70(4) :040602.)
[12]范栋，李得天，习振华，等.量子真空计量中的气体折射率测量方法研究［J］.中国激光，2021，48(23):2304002.(Fan Dong，Li De-tian，Xi Zhen-hua，et al.Research on measurement method of gas refractive index in quantum vacuum metrology［J］.Chinese Journal of Lasers，2021，48(23):2304002.)
[13]Mohr P J，Newell D B，Taylor B N，et al.Data and analysis for the CODATA 2017 special fundamental constants adjustment［J］.Metrologia，2018，55(1):125-146.
[14]Kumar A，Meath W J.Integrated dipole oscillator strengths and dipole properties for Ne，Ar，Kr，Xe，HF，HCl，and HBr［J］.Canadian Journal of Chemistry，1985，63(7):1616-1630.
[15]Thakkar A J，Hettema H，Wormer P E S.Ab initio dispersion coefficients for interactions involving rare-gas atoms［J］.The Journal of Chemical Physics，1992，97(5):3252-3257.
[16]Gaiser C，Fellmuth B.Polarizability of helium，neon，and argon:new perspectives for gas metrology［J］.Physical Review Letters，2018，120(12):123203.
[17]Gaiser C，Fellmuth B.Highly-accurate density-virial-coefficient values for helium，neon，and argon at 0.01℃ determined by dielectric-constant gas thermometry［J］.The Journal of Chemical Physics，2019，150(13):134303.
[18]Puchalski M，Piszczatowski K，Komasa J，et al.Theoretical determination of the polarizability dispersion and the refractive index of helium［J］.Physical Review A，2016，93(3):032515.
[19]Vogel E，Jager B，Hellmann R，et al.Ab initio pair potential energy curve for the argon atom pair and thermophysical properties for the dilute argon gas.II.thermophysical properties for low-density argon［J］.Molecular Physics，2010，108(24):3335-3352.
[20]Egan P F，Stone J A，Ricker J E，et al.Comparison measurements of low-pressure between a laser refractometer and ultrasonic manometer［J］.Review of Scientific Instruments，2016，87(5):053113.