Effect of TiAlSiN Coating Structure on Its Mechanical Properties

doi:10.12068/j.issn.1005-3026.2025.20230286

Abstract

Abstract:

TiSi （atomic ratio 80∶20） and AlTi （atomic ratio 67∶33） alloys were used as target materials by the vacuum arc ion plating technique. Two layers and multiple layers of TiAlSiN coating were deposited on the WC-Co substrates to study the effects of the coating structure on the microstructure， mechanical properties， and tribological properties of the coatings. TEM，SEM， EDS， XRD， nano-indentation instrument， microhardness instrument and binding force tester were used to analyze the cross sections of the coatings and the morphologies， compositions， microstructures， elastic moduli， microhardness and binding force of the coating. The tribological properties of the coatings were analyzed by the friction and wear testing machine. The results showed that the binding force （greater than 200 N） of the multilayer coatings is higher than that of the double-layer coatings. The double-layer coatings exhibit stronger resistance to plastic deformation， while the multilayer coatings show stronger resistance to elastic deformation. The friction coefficient of the coatings under low loads is greatly affected by the surface topography of the coating， while the surface topography of the coating under large load has little effect on the friction coefficient. Oxidation wear occurs only in the double-layer coatings， while abrasive wear occurs in the friction wear process of both coatings. The wear resistance of the multi-layer coatings is higher than that of the double-layer coatings.

Key words: arc ion plating, TiAlSiN, microstructure, mechanical property, tribological property

CLC Number:

TB 43

Xing-long LIU, Chen LI, Zeng LIN. Effect of TiAlSiN Coating Structure on Its Mechanical Properties[J]. Journal of Northeastern University(Natural Science), 2025, 46(4): 33-42.

Figures/Tables 16

Fig.1 Vacuum arc ion plating machine

Table 1 Chemical composition of the sample

WC	Co	C	其他
9.85	6.0	5.57	0.15

Table 2 Deposition parameters of the coatings

步骤	偏置电压/V	Ar cm³·min^-1	H₂ cm³·min^-1	N₂稳压/ Pa	弧电流/ A			沉积温度/℃	沉积时间/min
步骤	偏置电压/V	Ar cm³·min^-1	H₂ cm³·min^-1	N₂稳压/ Pa	Ti	AlTi	TiSi	沉积温度/℃	沉积时间/min
a-1	50	100	0	—	80	0	0	480	15
a-2	140	100	100	—	80	0	0	480	15
a-3	140	100	0	—	100	0	0	480	30
a-4	150	100	0	—	100	0	0	480	30
a-5	40	0	0	3.5	0	140	0	480	60
a-6	80	0	0	3.5	0	140	0	480	20
a-7	80	0	0	3.5	0	0	140	480	70
b-1	50	100	0	—	80	0	0	480	15
b-2	140	100	100	—	80	0	0	480	15
b-3	140	100	0	—	100	0	0	480	30
b-4	150	100	0	—	100	0	0	480	30
b-5	60	0	0	3.5	0	140	0	480	60
b-6	60	0	0	3.5	0	140	0	480	2
b-7	60	0	0	3.5	0		140	480	2
b-(8~21)	b-6与b-7往复叠层
b-22	60	0	0	3.5	0	140	0	480	30

Fig.2 Ball pit wear marks and structure diagram of the coating

Fig.3 XRD pattern of the TiAlSiN coating

Fig.4 TEM micrograph and EDS scanning image ofhigh-resolution cross-section of the double and multilayer structural coatings

Fig.5 Surface morphology of the coating

Fig.6 Size and number distribution of large particles and pits

Fig.7 Modulus, hardness, H/E, and H3/E2 of different coatings

Fig.8 Comparison of bonding force between two coatings

Fig.9 AE signal (AE), loading force (Fn), penetration depth (Pd), and scratch morphology of the dual-layer coating measured in the scratch test

Fig.10 AE signal (AE), loading force (Fn), penetration depth (Pd), and scratch morphology of the multi-layer structured coating measured in the scratch test

Fig.11 Friction coefficient of the coating under different loads

Fig.12 Friction coefficient and wear morphology ofthe coating under different loads

Fig.13 Coating wear rate under different loads

Fig.14 SEM and EDS elemental mapping images ofcoating wear marks

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