Journal of Northeastern University(Natural Science) ›› 2025, Vol. 46 ›› Issue (4): 33-42.DOI: 10.12068/j.issn.1005-3026.2025.20230286
• Mechanical Engineering • Previous Articles Next Articles
Xing-long LIU1,2, Chen LI1, Zeng LIN1
Received:
2023-10-09
Online:
2025-04-15
Published:
2025-07-01
CLC Number:
Xing-long LIU, Chen LI, Zeng LIN. Effect of TiAlSiN Coating Structure on Its Mechanical Properties[J]. Journal of Northeastern University(Natural Science), 2025, 46(4): 33-42.
WC | Co | C | 其他 |
---|---|---|---|
9.85 | 6.0 | 5.57 | 0.15 |
Table 1 Chemical composition of the sample
WC | Co | C | 其他 |
---|---|---|---|
9.85 | 6.0 | 5.57 | 0.15 |
步骤 | 偏置 电压/V | Ar cm3·min-1 | H2 cm3·min-1 | N2稳 压/ Pa | 弧电流/ A | 沉积温度/℃ | 沉积时间/min | ||
---|---|---|---|---|---|---|---|---|---|
Ti | AlTi | TiSi | |||||||
a-1 | 50 | 100 | 0 | — | 80 | 0 | 0 | 480 | 15 |
a-2 | 140 | 100 | 100 | — | 80 | 0 | 0 | 480 | 15 |
a-3 | 140 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
a-4 | 150 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
a-5 | 40 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 60 |
a-6 | 80 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 20 |
a-7 | 80 | 0 | 0 | 3.5 | 0 | 0 | 140 | 480 | 70 |
b-1 | 50 | 100 | 0 | — | 80 | 0 | 0 | 480 | 15 |
b-2 | 140 | 100 | 100 | — | 80 | 0 | 0 | 480 | 15 |
b-3 | 140 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
b-4 | 150 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
b-5 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 60 |
b-6 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 2 |
b-7 | 60 | 0 | 0 | 3.5 | 0 | 140 | 480 | 2 | |
b-(8~21) | b-6与b-7往复叠层 | ||||||||
b-22 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 30 |
Table 2 Deposition parameters of the coatings
步骤 | 偏置 电压/V | Ar cm3·min-1 | H2 cm3·min-1 | N2稳 压/ Pa | 弧电流/ A | 沉积温度/℃ | 沉积时间/min | ||
---|---|---|---|---|---|---|---|---|---|
Ti | AlTi | TiSi | |||||||
a-1 | 50 | 100 | 0 | — | 80 | 0 | 0 | 480 | 15 |
a-2 | 140 | 100 | 100 | — | 80 | 0 | 0 | 480 | 15 |
a-3 | 140 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
a-4 | 150 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
a-5 | 40 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 60 |
a-6 | 80 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 20 |
a-7 | 80 | 0 | 0 | 3.5 | 0 | 0 | 140 | 480 | 70 |
b-1 | 50 | 100 | 0 | — | 80 | 0 | 0 | 480 | 15 |
b-2 | 140 | 100 | 100 | — | 80 | 0 | 0 | 480 | 15 |
b-3 | 140 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
b-4 | 150 | 100 | 0 | — | 100 | 0 | 0 | 480 | 30 |
b-5 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 60 |
b-6 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 2 |
b-7 | 60 | 0 | 0 | 3.5 | 0 | 140 | 480 | 2 | |
b-(8~21) | b-6与b-7往复叠层 | ||||||||
b-22 | 60 | 0 | 0 | 3.5 | 0 | 140 | 0 | 480 | 30 |
Fig.10 AE signal (AE), loading force (Fn), penetration depth (Pd), and scratch morphology of the multi-layer structured coating measured in the scratch test
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