Effect of Spiral Groove Depth of Compound Molecular Pump’s Drag Stage on Compression Ratio
WANG Xiao-dong, ZHANG Lei, BA De-chun, TAO Ji-zhong
Journal of Northeastern University Natural Science . 2016, (10): 1437 -1440 .  DOI: 10.12068/j.issn.1005-3026.2016.10.015