Journal of Northeastern University(Natural Science)
Simulation Investigation on Discharge and Ion Transport of Pumping Units for Sputter Ion Pumps
NING Jiu-xin， HUANG Hai-long， WANG Xiao-dong， SUN Hao
Journal of Northeastern University Natural Science . 2020, (7): 962 -967 .  DOI: 10.12068/j.issn.1005-3026.2020.07.009