Journal of Northeastern University(Natural Science)
On the Cross Flow Regime Pumping Performance of Turbomolecular Pumps Based on DSMC Method
LI Bo， MA Zhao-jun， WANG Xiao-dong， BA De-chun
Journal of Northeastern University Natural Science . 2020, (11): 1623 -1628 .  DOI: 10.12068/j.issn.1005-3026.2020.11.016