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Journal of Northeastern University(Natural Science)
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中文
Flowmeter Method of Measuring the Pumping Speed of Miniature Sputter Ion Pump
GENG Jian， WANG Xiao-dong， GUO Mei-ru， HUANG Hai-long
Journal of Northeastern University(Natural Science) . 2022, (
9
): 1298 -1305 . DOI: 10.12068/j.issn.1005-3026.2022.09.012
