Wear Behavior of Polyurethane Polishing Pads Used in BK7 Ultrasonic Vibration-Assisted Polishing
LIANG Ying-dong, NIU Jun-kai, ZHANG Chao, YU Tian-biao
Journal of Northeastern University(Natural Science) . 2023, (1): 82 -88 .  DOI: 10.12068/j.issn.1005-3026.2023.01.012