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Journal of Northeastern University(Natural Science)
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中文
Study on Characteristics of NS/DSMC Two-Way Coupling Method Applied to Transition Flow Simulation in PECVD
LIU Wan-suo， YUE Xiang-ji， LIN Zeng
Journal of Northeastern University(Natural Science) . 2023, (
11
): 1591 -1596 . DOI: 10.12068/j.issn.1005-3026.2023.11.011
