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Journal of Northeastern University(Natural Science)
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中文
Effects of the Length of the Anode Cylinder in the Miniature Sputter Ion Pump on the Pumping Characteristics
GENG Jian， WANG Xiao-dong， GUO Mei-ru， REN Zheng-yi
Journal of Northeastern University(Natural Science) . 2023, (
11
): 1596 -1603 . DOI: 10.12068/j.issn.1005-3026.2023.11.012
