Journal of Northeastern University(Natural Science)
Research Progress on the Corrosion Failure Behavior of Coatings on Aluminum Alloy for Semiconductor Fabrication Equipment
Yang ZHAO, Yu-hang WANG, Tao ZHANG, Fu-hui WANG
Journal of Northeastern University(Natural Science) . 2025, (3): 28 -45 .  DOI: 10.12068/j.issn.1005-3026.2025.20240182