Journal of Northeastern University(Natural Science)
Ti-N-C films deposited by MF unbalanced magnetron sputtering process with twin targets
Zhang, Yi-Chen (1); Ba, De-Chun (1); Yan, Yun-Hui (1); Ma, Sheng-Ge (2)
Journal of Northeastern University . 2008, (7): 1049 -1052 .  DOI: -