In2O3多孔有序薄膜的制备及其对丁酮气敏特性

doi:10.12068/j.issn.1005-3026.2022.12.004

东北大学学报（自然科学版） ›› 2022, Vol. 43 ›› Issue (12): 1694-1701.DOI: 10.12068/j.issn.1005-3026.2022.12.004

In₂O₃多孔有序薄膜的制备及其对丁酮气敏特性

苑振宇，郭忠明，封怡超，李泽宇

(东北大学信息科学与工程学院，辽宁沈阳110819)

发布日期:2022-12-26
通讯作者: 苑振宇
作者简介:苑振宇(1985-)，男，内蒙古赤峰人，东北大学副教授，博士生导师.
基金资助:
国家重点研发计划项目(2020YFB2008702).

Preparation of Porous Ordered Films of In₂O₃ and Its Gas Sensitive Characteristics to Butanone

YUAN Zhen-yu， GUO Zhong-ming， FENG Yi-chao， LI Ze-yu

School of Information Science & Engineering， Northeastern University， Shenyang 110819， China.

Published:2022-12-26
Contact: YUAN Zhen-yu
About author:-
Supported by:
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摘要/Abstract

摘要： 利用气/液界面自组装法和溶液浸渍转移法制备了单层和双层氧化铟多孔有序气敏薄膜，并对其进行了气敏特性测试，同时利用多物理场耦合进行气敏特性仿真研究.结果表明，制备的气敏薄膜具有规则的孔道结构，孔壁呈现为具有大比表面积的片状结构.基于该气敏材料的气体传感器对丁酮表现出优良的气敏特性，单层In₂O₃多孔有序气体传感器在最佳工作温度350℃的条件下对质量分数为100×10^-6的丁酮的灵敏度为15.37，响应时间仅为4.3s；双层In₂O₃多孔有序气体传感器在最佳工作温度375℃的条件下对质量分数为100×10^-6的丁酮的灵敏度为20.45，响应时间为22.7s.仿真结果与气敏特性测试结果吻合较好.

关键词: 气/液界面自组装；气体传感器；多孔有序气敏薄膜；In₂O₃；丁酮；响应时间；多物理场

Abstract: Monolayer and bilayer porous ordered gas sensitive films of In₂O₃ were prepared by gas/liquid interfacial self-assembly method and solution impregnation transfer method， and the gas sensitive characteristics of the films were tested. At the same time， coupling of multiple physical fields was used to simulate the gas sensitive characteristics. The results show that the gas sensitive film has regular pore structure and the pore wall is a flake structure with large specific surface area. The gas sensors based on the gas sensitive material show excellent gas sensitive characteristics to butanone. The monolayer In₂O₃ porous ordered gas sensor has a sensitivity of 15.37 to the mass fraction of 100×10^-6 butanone at the optimal operating temperature of 350℃， and the response time is only 4.3s. The sensitivity of the bilayer In₂O₃ porous ordered gas sensor to the mass fraction of 100×10^-6 butanone is 20.45， and the response time is 22.7s at the optimal operating temperature of 375℃. The simulation results are in good agreement with the test results of gas sensitive characteristics.

Key words: gas/liquid interfacial self-assembly; gas sensor; porous ordered gas sensitive film; In₂O₃; butanone; response time; multiple physical fields

中图分类号:

TP212.2

苑振宇，郭忠明，封怡超，李泽宇. In₂O₃多孔有序薄膜的制备及其对丁酮气敏特性[J]. 东北大学学报（自然科学版）, 2022, 43(12): 1694-1701.

YUAN Zhen-yu， GUO Zhong-ming， FENG Yi-chao， LI Ze-yu. Preparation of Porous Ordered Films of In₂O₃ and Its Gas Sensitive Characteristics to Butanone[J]. Journal of Northeastern University(Natural Science), 2022, 43(12): 1694-1701.

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In₂O₃多孔有序薄膜的制备及其对丁酮气敏特性

Preparation of Porous Ordered Films of In₂O₃ and Its Gas Sensitive Characteristics to Butanone

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