东北大学学报（自然科学版）

东北大学学报(自然科学版) ›› 2005, Vol. 26 ›› Issue (1): 251-254.DOI: -

• 论著 • 上一篇    下一篇

成膜条件对TiO_2显微结构与光媒特性的影响

杨佳龙;王福;左良;YI Gu-chul   

  1. 东北大学材料与冶金学院;东北大学材料与冶金学院;东北大学材料与冶金学院;Pohang University of Science and Technology; Pohang; Korea. 辽宁沈阳　110004
  • 收稿日期:2013-06-24 修回日期:2013-06-24 出版日期:2005-01-15 发布日期:2013-06-24
  • 通讯作者: Yang, J.-L.
  • 作者简介:-
  • 基金资助:
    国家高技术研究发展计划项目(2003AA331080)

Effects of preparation conditions on TiO2 thin film's microstructure and photocatalytic characteristics

Yang, Jia-Long (1); Wang, Fu (1); Zuo, Liang (1); Yi, Gu-Chul (2)   

  1. (1) Sch. of Mat. and Metall., Northeastern Univ., Shenyang 110004, China; (2) Pohang Univ. of Sci. and Technol., Pohang, Korea, Republic of
  • Received:2013-06-24 Revised:2013-06-24 Online:2005-01-15 Published:2013-06-24
  • Contact: Yang, J.-L.
  • About author:-
  • Supported by:
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摘要： 用有机金属化学气相沉淀(MOCVD)与溶胶 凝胶(sol gel)法制备二氧化钛薄膜·通过XRD,FE SEM,AFM以及光照TiO2薄膜来降解橙色Ⅱ溶液的方法,研究了TiO2膜的晶体结构、微观表面特性与形貌以及薄膜的光媒特性·比较了不同的TiO2薄膜形成条件对晶格特性与光媒活度的影响·结果表明,成膜温度对薄膜的微观结构及晶体学特性有很大影响;用MOCVD方法得到的TiO2膜,其光媒活度明显高于用sol gel法得到的TiO2膜·

关键词: MOCVD, solgel, TiO2薄膜, 光媒特性, 退火

Abstract: Uniform TiO2 films have been prepared on silicon substrates by MOCVD and sol-get processes separately. XRD, FE-SEM and AFM were employed to investigate the characteristics of the TiO2 films, including their crystallinities, microstructures and morphologies. In addition, the aqueous orange II was used to investigate their photo-catalytic degradation properties. Effects of different preparation conditions on their crystallinities and photo-catalytic activities were compared. The results showed that the effect of film preparation temperature on the crystallinities and microstructures is considerable, and the films deposited by MOCVD exhibit a higher efficiency in dye solution degradation than that of the films impregnated by sol-gel.

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