Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film

doi:10.12068/j.issn.1005-3026.2021.11.007

Abstract

Abstract: In the process of NdFeB rare-earth permanent magnet corrosion protection， the substrate temperature of TiN protective membrane takes a great influence on protective effect. The magnetron sputtering technology was carried out to deposit TiN film on NdFeB permanent magnet surface and the effects of substrate temperature on the microstructure and corrosion protection performance of TiN film were studied through FESEM， XRD， electrochemical detection and permanent magnetic nondestructive testing technologies. The results showed that the substrate temperature had a great influence on the film’s property. The increase of temperature was conducive to the growth of grain and to promote the TiN (111) texture. It was found that the corrosion resistance of the film was the strongest at the substrate temperature of 300℃ with the greatest loss of magnetic property. When the substrate temperature was 100℃， the film had the best protective performance on the substrate， associated with a stronger corrosion resistance and less loss of magnetic property.

Key words: magnetron sputtering; TiN; substrate temperature; corrosion resistance; magnetic properties

CLC Number:

TM273
TB304

XIE Yuan-hua， DENG Wen-yu， WANG Peng-yang， WAN Yi. Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film[J]. Journal of Northeastern University(Natural Science), 2021, 42(11): 1562-1568.

References

[1]Zhang P J，Zhu M G，Li W，et al.Study on preparation and properties of CeO₂/epoxy resin composite coating on sintered NdFeB magnet［J］.Journal of Rare Earths，2018，36(5):544-551.
[2]Jacobson J，Kim A.Oxidation behavior of Nd-Fe-B magnets［J］.Journal of Applied Physics，1987，61:3763-3765.
[3]El-Moneim A A.Passivity and its breakdown of sintered NdFeB-based magnets in chloride containing solution［J］. Corrosion Science，2004，46(10):2517-2532.
[4]Cheng Y Y，Pang X L，Gao K W，et al.Corrosion resistance and friction of sintered NdFeB coated with Ti/TiN multilayers［J］.Thin Solid Films，2014，550:428-434.
[5]Kao C T，Ding S J，Chen Y C，et al.The anticorrosion ability of titanium nitride(TiN)plating on an orthodontic metal bracket and its biocompatibility［J］.Journal of Biomedical Materials Research，2002，63(6):786-792.
[6]Sun Z P，He G Y，Meng Q J，et al.Corrosion mechanism investigation of TiN/Ti coating and TC4 alloy for aircraft compressor application［J］.Chinese Journal of Aeronautics，2020，33(6):1824-1835.
[7]Tkadletz M，Lechner A，Schalk N，et al.Reactively sputtered TiN/SiO₂ multilayer coatings with designed anisotropic thermal conductivity-from theoretical conceptualization to experimental validation［J］.Surface and Coatings Technology，2020，393:125763.
[8]Soltanalipour M，Khalil-Allafi J，Ghareshabani E，et al.Electrochemical behaviour of NiTi alloy coated with TiN using DPF［J］.Surface Engineering，2017，33(6):474-481.
[9]aha I，Alves A C，Affono L J，et al.Corrosion and tribocorrosion behaviour of titanium nitride thin films grown on titanium under different deposition times［J］.Surface and Coatings Technology，2019，374:878-888.
[10]Das S，Guha S，Ghadai R，et al.Morphological，mechanical property analysis and comparative study over structural properties of CVD TiN film grown under different substrate temperature in nitrogen gas atmosphere［J］.Silicon，2020，11:07.
[11]Caicedo J C，Cabrera G，Caicedo H H，et al.Nature in corrosion-erosion surface for ［TiN/TiAlN］n nanometric multilayers growth on AISI 1045 steel［J］.Thin Solid Films，2012，520(13):4350-4361.
[12]梁威.金属铈表面氮化物薄膜制备及其抗腐蚀性能研究［D］.北京:清华大学，2018.(Liang Wei.Study on the preparation and anticorrosion properties of nitride films on cerium surface ［D］.Beijing:Tsinghua University，2018.)
[13]于映，陈跃.NiCr溅射薄膜内应力的研究［J］.真空电子技术，2000，5:9-12.(Yu Ying，Chen Yue.Study on internal stresses of sputtered nickel chromium thin films［J］.Vacuum Electronics，2000，5:9-12.)
[14]陈昶，曹凤红，邓迟，等.LiFePO₄/C多层膜的制备及电化学性能研究［J］.表面技术，2019，48(2):86-91.(Chen Chang，Cao Feng-hong，Deng Chi，et al.Preparation and electrochemical properties of LiFePO₄/C multilayer ［J］.Surface Technology，2019，48(2):86-91.)
[15]谢启.等离子体增强磁控溅射制备TiVN薄膜技术研究［D］.北京:中国地质大学，2019.(Xie Qi.Study of deposition technique of TiVN thin films by plasma enhanced magnetron sputtering［D］.Beijing:China University of Geosciences，2019.)
[16]毕明康.磁场增强高功率脉冲磁控溅射放电特性及TiAlN薄膜制备研究［D］.哈尔滨:哈尔滨工业大学，2014.(Bi Ming-kang.Discharge characteristics of magnetic field enhanced high power impulse magnetron sputtering and preparation of TiAlN films［D］.Harbin:Harbin Institute of Technology，2014.)
[17]李滢，陈小龙，孙超.热障涂层陶瓷层材料LnMgAl₁₁O₁₉(Ln=La，Nd)粉体的性能［J］.材料研究学报，2019，33(6):409-418.(Li Ying，Chen Xiao-long，Sun Chao.Preparation and performance of LnMgAl₁₁O₁₉(Ln=La，Nd)powders for thermal barrier coating［J］.Chinese Journal of Materials Research，2019，33(6):409-418.)
[18]Chou W J，Yu G P，Huang J H.Mechanical properties of TiN thin film coatings on 304 stainless steel substrates［J］. Surface and Coatings Technology，2002，149(1):7-13.
[19]Subramanian B，Ashok K，Jayachandran M.Effect of substrate temperature on the structural properties of magnetron sputtered titanium nitride thin films with brush plated nickel interlayer on mild steel［J］.Applied Surface Science，2008，255(5):2133-2138.
[20]Roman D，Bernardi J，Amorim C L G D，et al.Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering［J］.Materials Chemistry and Physics，2011，130(1):147-153.
[21]郑蒙.钕钇铁硼快淬带的磁性与微结构［D］.北京:钢铁研究总院，2017.(Zheng Meng.Magnetism and microstructure of Nd-Y-Fe-B melt-spun ribbons［D］.Beijing:General Institute of Iron and Steel Research，2017.)
[22]王凌燕，于旭光，张翼.温度对33EH高性能烧结钕铁硼永磁体磁性能的影响［J］.特殊钢，2015，36(1):45-48.(Wang Ling-yan，Yu Xu-guang，Zhang Yi.Effect of temperature on magnetic performance of 33EH high quality sintered NdFeB permanent magnets［J］.Special Steel，2015，36(1):45-48.)(上接第1553页)
[16]刘金海，张化光，冯健.基于压力时间序列的输油管道在线泄漏故障诊断算法［J］.东北大学学报(自然科学版)，2009，30(3):321-324.(Liu Jin-hai，Zhang Hua-guang，Feng Jian.On-line leak-detection method for pressure time series of oil pipeline［J］.Journal of Northeastern University(Natural Science)，2009，30(3):321-324.)
[17]Huang S F，Horng C T，Chang C L，et al.Time delay autocorrelation analysis of EEG time series for the patients of early mild Alzheimer’s disease［J］.Life Science Journal，2017，14(1):78-81.
[18]李夕海，刘代志，张斌，等.基于重采样的混沌时间序列相空间重构研究［J］.信号处理，2006(2):248-251.(Li Xi-hai，Liu Dai-zhi，Zhang Bin，et al.A resampling based phase space reconstruction for chaotic time series［J］.Journal of Signal Processing，2006(2):248-251.)
[19]Michael T R，James J C，Carlo J D L，et al.Reconstruction expansion as a geometry-based framework for choosing proper delay times［J］.Physica D:Nonlinear Phenomena，1994，73(1/2):82-98.
[20]Lee J，Guo Y，Ravikumar V，et al.Towards the development of nonlinear approaches to discriminate AF from NSR using a single-lead ECG［J］.Entropy，2020，22(5):531.
[21]Kennel M B，Abarbanel H D I.False neighbors and false strands:a reliable minimum embedding dimension algorithm ［J］.Physical Review E，2002，66(2):026209.
[22]刘树勇，朱石坚，俞翔.确定相空间重构嵌入维数的研究［J］.哈尔滨工程大学学报，2008，29(4):374-381.(Liu Shu-yong，Zhu Shi-jian，Yu Xiang.Determinating the embedding dimension in phase space reconstruction［J］. Journal of Harbin Engineering University，2008，29(4):374-381.)
[23]Matilla-García M，Morales I，Rodríguez J M，et al.Selection of embedding dimension and delay time in phase space reconstruction via symbolic dynamics.［J］.Entropy，2021，23(2):531.
[24]Yadav S S，Jadhav S M.Deep convolutional neural network based medical image classification for disease diagnosis［J］.Journal of Big Data，2019，6(3):1122-1131.
[25]Jiang F F，Xu J A，Lu Z Y，et al.A transfer learning approach to detect paroxysmal atrial fibrillation automatically based on ballistocardiogram signal［J］.Journal of Medical Imaging and Health Informatics，2019，9(2):1943-1949.
[26]Cao L Y.Practical method for determining the minimum embedding dimension of a scalar time series［J］.Physica D:Nonlinear Phenomena， 1997，110(1):43-57.