Abstract: The hydrogenated amorphous carbon (a-C:H) thin films were successfully deposited on stainless steel substrate by radio frequency plasma enhanced chemical vapor deposition (RF PECVD). The microstructure and morphology of the film were investigated by means of Raman spectroscopy, X-ray photoelectron spectroscopy, infrared spectrometry and atomic force microscopy. The friction and wear behavior of the film sliding against a stainless steel ball under different loads and at different velocities were examined on a pin-on-disc tester. It was found that the film prepared by RF PECVD has typical hydrogenated diamond-like characteristics and is very smooth and compact, and it shows good friction-reducing and wearable behavior when sliding against a stainless steel ball. The results also revealed that the films wearability is in relation to the graphite transfer film formed on the worn surface and the graphitization of the film in tribological process.