Abstract: To reduce oxygen content and inclusions in the high titanium ferroalloy prepared by the aluminum thermal reduction, the vacuum reduction refining method was used to prepare the low oxygen high titanium ferroalloy in which the high titanium ferroalloy prepared by aluminum thermal method was used as raw materials. Effects of the refining temperature and refining slags were studied. The high titanium ferroalloy was characterized by XRD, SEM and chemical elemental analysis. The results showed that the microstructure of the reduction refining alloy is uniform and compact, the inclusions in the alloy are effectively removed and the oxygen content decreases dramatically. The mass percent composition of Ti, Fe, Al, Si, O in the refined alloy prepared with CaO-Al2O3 as vefining slag at 2000°C is 74.5%, 18.2%, 2.17%, 0.81%, 3.20%, respectively, which is fully consistent with the technical indicators of the high quality high titanium ferroalloy.