Journal of Northeastern University Natural Science ›› 2018, Vol. 39 ›› Issue (2): 237-241.DOI: 10.12068/j.issn.1005-3026.2018.02.018

• Mechanical Engineering • Previous Articles     Next Articles

Modelling and Simulation of a Surface Stress-Included Microcantilever-based Mass Sensor

MA Shu-jun, XIU Qiang   

  1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China.
  • Received:2016-08-11 Revised:2016-08-11 Online:2018-02-15 Published:2018-02-09
  • Contact: MA Shu-jun
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Abstract: A theoretical model, which takes surface stress into account by applying Rayleigh-Ritz theorem, for a cantilever-based mass sensor is proposed, in order to consider the surface stress induced by the adsorbed layer or coating of different materials on the cantilever resonator and to further enhance the accuracy and performance of the cantilever sensor. Stress parameter is introduced into the governing equation of the cantilever vibration to adjust the mode shape function, and the influence of the surface stress towards the vibration is systematically analyzed. With this model, the position and mass of the particle can be precisely determined through the frequency shifts of the microcantilever before and after the particle adsorption. The accuracy and the reliability of this method were validated by finite element simulation.

Key words: microcantilever, mass sensing, surface stress, Euler-Bernoulli beam theory, Rayleigh-Ritz theorem

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