Journal of Northeastern University(Natural Science)

Journal of Northeastern University ›› 2011, Vol. 32 ›› Issue (8): 1072-1075.DOI: -

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Assembly of single-walled carbon nanotube field-effect transistor using dielectrophoresis

Wu, Cheng-Dong (1); Xu, Ke (2); Tian, Xiao-Jun (2); Dong, Zai-Li (2)   

  1. (1) School of Information Science and Engineering, Northeastern University, Shenyang 110819, China; (2) State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Acad. of Sci., Shenyang 110016, China; (3) Graduate University of the Chinese Acad. of Sci., Beijing 100049, China; (4) School of Information and Control Engineering, Shenyang Jianzhu University, Shenyang 110168, China
  • Received:2013-06-19 Revised:2013-06-19 Published:2013-04-04
  • Contact: Xu, K.
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Abstract: With respect to the assembly of carbon nanotube field-effect transistors, the dielectrophoresis technology was used to assemble single-walled carbon nanotubes (SWCNTs) between micro-electrodes. The dielectrophoretic force driving SWCNTs in a non-uniform electric field was analyzed theoretically. The driving electric field of dielectrophoresis was simulated by the COMSOL software. A number of experiments were carried out, with the required experimental parameters for efficient assembling of SWCNTs obtained. AFM scanning and electrical properties of SWCNTs showed that the method can achieve the effective assembly of carbon nanotube field-effect transistors, and that it is also an effective method of assembly and manufacture for other one-dimensional nanomaterials assembly of nanoelectronic devices.

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