Modeling and Simulation of Micro-cantilever Vibrating in Inviscid Fluid Domains

doi:10.12068/j.issn.1005-3026.2018.09.012

Abstract

Abstract: Based on the Euler-Bernoulli beam theory， the resonant frequency of micro-cantilever in vacuum was derived and calculated， then the resonant frequency of micro-cantilever in fluids with different density was calculated according to the classical non-viscous theoretical model. In the finite element software ANSYS (16.0) simulation environment， the solid45-fluid30 and shell63-fluid30 units were used to establish a three-dimensional model of micro-cantilever in the fluid domain and modal analysis was also performed. Finally， the simulation results were compared with the experimental and theoretical data reported by other researchers. Besides， experiments were done to verify the correctness of the finite element model. The theory that density of inviscid fluid is the main factor affecting the resonant frequency of micro-cantilever， is further verified by the finite element method and experimental method.

Key words: inviscid fluid, ANSYS, modal analysis, resonance frequency, dynamic properties

CLC Number:

TP206

MA Shu-jun， XUAN Hang， SUN Jia-wei， YANG Lei. Modeling and Simulation of Micro-cantilever Vibrating in Inviscid Fluid Domains[J]. Journal of Northeastern University Natural Science, 2018, 39(9): 1272-1276.

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