Modal Analysis of the Rotor System of TurboMolecular Pump Based on FiniteElement Method

doi:10.12068/j.issn.1005-3026.2014.03.024

Journal of Northeastern University Natural Science ›› 2014, Vol. 35 ›› Issue (3): 411-413.DOI: 10.12068/j.issn.1005-3026.2014.03.024

• Mechanical Engineering • Previous Articles Next Articles

Modal Analysis of the Rotor System of TurboMolecular Pump Based on FiniteElement Method

WANG Xiaodong¹， SUN Yan¹， FANG Liwu²， LI Xiaoyong²

1. School of Mechanical Engineering & Automation， Northeastern University， Shenyang 110819， China; 2. LeyFond Vacuum Technology Co.， Ltd.， Beijing 100029， China.

Received:2013-06-07 Revised:2013-06-07 Online:2014-03-15 Published:2013-11-22
Contact: WANG Xiaodong
About author:-
Supported by:
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Abstract

Abstract: The geometric model of FB1500 turbomolecular pump (TMP) rotor system was established based on the construction， parameters and material of the rotor， the bearing support style and mass distribution of rotor. The critical speeds and the vibration modes were obtained by the modal analysis of TMP rotor system based on the commercial finiteelement code ANSYS. The modal analysis results show that the TMP is operated between the speed of 5 and 6 order natural frequency，but it is not fully satisfy the design theory of the flexible drive system to avoid the sympathetic vibration during TMP operation.The natural frequency of TMP rotor system can be increased with the moment of inertia increasing， and a structure improvement of TMP rotor system was proposed to increase the TMP operating reliability.

Key words: turbomolecular pump, rotor system, critical speed, modal analysis, finiteelement method

CLC Number:

TB75227

WANG Xiaodong， SUN Yan， FANG Liwu， LI Xiaoyong. Modal Analysis of the Rotor System of TurboMolecular Pump Based on FiniteElement Method[J]. Journal of Northeastern University Natural Science, 2014, 35(3): 411-413.

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Modal Analysis of the Rotor System of TurboMolecular Pump Based on FiniteElement Method

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