Preparation of Porous Ordered Films of In2O3 and Its Gas Sensitive Characteristics to Butanone

doi:10.12068/j.issn.1005-3026.2022.12.004

Abstract

Abstract: Monolayer and bilayer porous ordered gas sensitive films of In₂O₃ were prepared by gas/liquid interfacial self-assembly method and solution impregnation transfer method， and the gas sensitive characteristics of the films were tested. At the same time， coupling of multiple physical fields was used to simulate the gas sensitive characteristics. The results show that the gas sensitive film has regular pore structure and the pore wall is a flake structure with large specific surface area. The gas sensors based on the gas sensitive material show excellent gas sensitive characteristics to butanone. The monolayer In₂O₃ porous ordered gas sensor has a sensitivity of 15.37 to the mass fraction of 100×10^-6 butanone at the optimal operating temperature of 350℃， and the response time is only 4.3s. The sensitivity of the bilayer In₂O₃ porous ordered gas sensor to the mass fraction of 100×10^-6 butanone is 20.45， and the response time is 22.7s at the optimal operating temperature of 375℃. The simulation results are in good agreement with the test results of gas sensitive characteristics.

Key words: gas/liquid interfacial self-assembly; gas sensor; porous ordered gas sensitive film; In₂O₃; butanone; response time; multiple physical fields

CLC Number:

TP212.2

YUAN Zhen-yu， GUO Zhong-ming， FENG Yi-chao， LI Ze-yu. Preparation of Porous Ordered Films of In₂O₃ and Its Gas Sensitive Characteristics to Butanone[J]. Journal of Northeastern University(Natural Science), 2022, 43(12): 1694-1701.

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Preparation of Porous Ordered Films of In₂O₃ and Its Gas Sensitive Characteristics to Butanone

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