Sensitivity Analysis of ZnO Nanometer Gas Sensor Based on Dynamic Temperature Modulation

doi:10.12068/j.issn.1005-3026.2021.04.003

Abstract

Abstract: The nano-ZnO gas-sensing material was produced by the hydrothermal method， and the morphology of the finished product under two-solvent washing and water washing was analyzed. The sensitivity， stability and response/recovery time and other characteristic parameters were tested by the traditional static test methods. Aiming at the selectivity and stability of metal oxide gas sensors， a novel dynamic temperature modulation test method was proposed based on the static test. The response of sensors under different waveform(triangular wave， rectangular wave， and trapezoidal wave)was systematically studied， and the influence of symmetry under triangular wave and the influence of interfering gas and amplitude based on trapezoidal wave on sensor response were analyzed.The research results can provide the technical foundation for accurate sensing devices in the front of artificial intelligence industry.

Key words: gas sensor; semiconductor metal oxides; ZnO; dynamic temperature modulation; waveform analysis

CLC Number:

TP212.2

YUAN Zhen-yu， LEI Yan-feng， DONG Hui， MENG Fan-li. Sensitivity Analysis of ZnO Nanometer Gas Sensor Based on Dynamic Temperature Modulation[J]. Journal of Northeastern University(Natural Science), 2021, 42(4): 469-477.

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